A compact MMIC-compatible RF MEMS switch

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4981, Issue , 2003, Pages 222-229

  Dyck, Christopher W ^a   Plut, Thomas A ^a   Nordquist, Christopher D ^a   Kraus, Garth ^a   Schmidt, Gary D ^a   Gass, Karl ^a   Finnegan, Patrick S ^a   Reines, Isak ^a   Sullivan, Charles ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; DIELECTRIC FILMS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MONOLITHIC MICROWAVE INTEGRATED CIRCUITS;

COUPLING CAPACITANCE;

ELECTRIC SWITCHES;

EID: 0037721403     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.498237     Document Type: Conference Paper

References (20)

1. B. R. Norvell, R. J. Hancock, J. K. Smith, M. L. Pugh, S. W. Theis, and J. Kviatkofsky, "Micro Electro Mechanical Switch (MEMS) Technology Applied to Electronically Scanned Arrays for Space Based Radar," Proc. IEEE Aerospace Conf., 1999, pp. 239-247.
2. J. J. Yao, "RF MEMS from a device perspective," J. Micromech. Microeng., 10 (2000), pp. R9-R38.
3. G. M. Rebeiz and J. M. Muldavin, "RF MEMS Switches and Switch Circuits," IEEE Microwave Magazine, Dec., 2001, pp. 59-71.
4. th Int. Conf. on Solid-State Sensors and Actuators (Eurosensors IX), 1995, pp. 384-387.
5. S. Pacheco, C. T. Nguyen, and L. P. B. Katehi, "Micromechanical Electrostatic K-Band Switches," IEEE MTTS, 1998, pp. 1569-1572.
6. C. L. Goldsmith, Z. Yao, S. Eshelman, and D. Denniston, "Performance of Low-Loss RF MEMS Capacitive Switches," IEEE Microwave and Guided Wave Letters, vol. 8, no. 8, August, 1998, pp. 269-271.
7. D. Hyman, A. Schmitz, B. Warneke, T. Y. Hsu, J. Lam, J. Brown, J. Schaffner, A. Walston, R. Y. Loo, G. L. Tangonan, M. Mehregany, and J. Lee, "GaAs-compatible surface-micromachined RF MEMS switch," IEEE Elec. Lett., vol. 35, no. 3, 1999, pp. 224-226.
8. J. B. Muldavin and G. M. Rebeiz, "30 GHz Tuned MEMS Switches," IEEE MTT-S, 1999, pp. 1511-1514.
9. G. L. Tan, R. E. Mihailovich, J. B. Hacker, J. F. DeNatale, and G. M. Rebeiz, "A Very-Low-Los 2-Bit X-Band RF MEMS Phase Shifter," Proc. 2002 IEEE MTT-S, pp. 333-335.
10. A. Malczewski, S. Eshelman, B. Pillans, J. Ehmke, and C. L. Goldsmith, "X-Band RF MEMS Phase Shifters for Phased Array Applications," IEEE Microwave and Guided Letters, vol. 9, no. 10, Dec., 2002, pp. 517-519.
11. N. S. Barker and G. M. Rebeiz, "Distributed MEMS True-Time Delay Phase Shifters and Wide-Band Switches," IEEE Trans. Microwave Theory and Techniques, vol. 46, no. 11, Nov., 1998, pp. 1881-1890.
12. J. Brank, J. Yao, M. Eberly, A. Malczewski, K. Varian, and C. Goldsmith, "RF MEMS-Based Tunable Filters," International Journal of RF and Microwave Computer-Aided Engineering, vol. 11, no. 5, Sep., 2001, pp. 276-284.
13. D. Choudhury and J. A. Foschaar, "A Micro-Electro-Mechanically (MEM) Switched Microstrip Ring Resonator," Technical Digest IEDM, 1999, pp. 693-696.
14. J. H. Schaffner, D. F. Sievenpiper, and R. Y. Loo, "A Wideband Beam Switching Antenna Using RF MEMS Switches," Proc. Int. Symp. on Antennas and Propagation, 2001, pp. 658-661.
15. W. H. Weedon, W. J. Payne, and G. M. Rebeiz, "MEMS-Switched Reconfigurable Antennas," Proc. Int. Symp. on Antennas and Propagation, 2001, pp. 654-657
16. B. A. Cetiner, L. Jofre, C. H. Chang, J. Y. Qian, M. Bachmann, G. P. Li, and F. D. Flaviis, "Integrated MEM Antenna System for Wireless Communications," Proc. IEEE MTT-S, 2002, pp. 1333-1336.
17. J. Schimkat, "Contact measurements providing basic design data for microrelay actuators," Sensors and Actuators A, 73 (1999) pp. 138-143.
18. D. Hyman and M. Mehregany, "Contact Physics of Gold Microcontacts for MEMS Switches," IEEE Trans. on Components and Packaging Technology, vol. 22, no. 3, Sept., 1999, pp. 357-364.
19. S. Majumder, N. E. McGruer, G. G. Adams, P. M. Zavracky, R. H. Morrison, and J. Krim, "Study of contactacts in an electrostatically actuated microswitch," Sensors and Actuators A, 93 (2001) pp. 19-26.
20. B. McCarthy, G. G. Adams, N. E. McGruer, and D. Potter, "A Dynamic Model, Including Contact Bounce, of an Electrically Actuated Microswitch," Journal of Microelectromechanical Systems, vol. 11, no. 3, June, 2002, pp. 276-283.