Techniques for reliability analysis of MEMS RF switch

IEEE International Reliability Physics Symposium Proceedings

Volumn 2002-January, Issue , 2002, Pages 116-117

  DeNatale, J ^a   Mihailovich, R ^a   Waldrop, J ^a  

^a ROCKWELL SCIENTIFIC COMPANY   (United States)

Author keywords

Atomic force microscopy; Contacts; Electric resistance; Electrical resistance measurement; Force measurement; Micromechanical devices; Microswitches; Radio frequency; Radiofrequency identification; Switches

Indexed keywords

ATOMIC FORCE MICROSCOPY; CONTACTS (FLUID MECHANICS); ELECTRIC RESISTANCE; ELECTRIC SWITCHES; FORCE MEASUREMENT; RADIO FREQUENCY IDENTIFICATION (RFID); RELIABILITY; SEMICONDUCTOR DEVICES; SWITCHES;

DIFFERENT MECHANISMS; ELECTRICAL RESISTANCE MEASUREMENT; EXPERIMENTAL METHODS; MICROMECHANICAL DEVICE; MICROSWITCHES; RADIO FREQUENCIES; RELIABILITY IMPROVEMENT; SEPARATION AND IDENTIFICATION;

RELIABILITY ANALYSIS;

EID: 84949226963     PISSN: 15417026     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/RELPHY.2002.996620     Document Type: Conference Paper

References (2)

1. R.E. Mihailovich, et al, "MEM Relay for Reconfigurable RF Circuits," IEEE Microwave Wireless Components Lett., vol. 11, Feb. 2001, pp. 53-55.
2. R. Holm, Electric Contacts, Theory and Application, Springer-Verlag, 1967.