Fabrication and characterization of a micromechanical sensor for differential detection of nanoscale motions

Journal of Microelectromechanical Systems

Volumn 11, Issue 6, 2002, Pages 703-708

  Savran, Cagri A ^a   Sparks, Andrew W ^a   Sihler, Joachim ^d   Li, Jian ^d   Wu, Wan Chen ^d   Berlin, Dean E ^d   Burg, Thomas P ^b   Fritz, Jürgen ^c   Schmidt, Martin A ^b   Manalis, Scott R ^a  

^a MIT MEDIA LAB   (United States)

^b USA   (United States)

^c MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^d Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

AFM technology; BioMEMS; Biosensor; Chemical biological functionalization; Diffraction; Interdigitated; Silicon nitride

Indexed keywords

ELECTROMAGNETIC WAVE DIFFRACTION; GEOMETRY; INTERFEROMETRY; MICROMACHINING; SENSORS;

NANOSCALE MOTIONS;

MICROELECTROMECHANICAL DEVICES;

EID: 0036902858     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2002.805057     Document Type: Article

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