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Volumn 3948, Issue , 2000, Pages 80-93
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Micromechanical uncooled photon detectors
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Author keywords
[No Author keywords available]
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
CARRIER CONCENTRATION;
CHARGE CARRIERS;
CRYSTAL LATTICES;
CRYSTAL MICROSTRUCTURE;
MICROELECTROMECHANICAL DEVICES;
SEMICONDUCTING INDIUM COMPOUNDS;
SEMICONDUCTING SILICON;
SEMICONDUCTOR DEVICE STRUCTURES;
STRESS ANALYSIS;
MICROMECHANICAL PHOTON DETECTOR;
PHOTOINDUCED STRESS;
THERMAL DETECTOR;
INFRARED DETECTORS;
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EID: 0033740295
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.382109 Document Type: Conference Paper |
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Times cited : (15)
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References (42)
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