Accurate simulation of RF MEMS VCO performance including phase noise

Journal of Microelectromechanical Systems

Volumn 14, Issue 2, 2005, Pages 313-325

  Behera, Manas ^a,b   Kratyuk, Volodymyr ^a   De, Sudipto K ^c   Aluru, Narayan R ^c   Hu, Yutao ^a,b   Mayaram, Kartikeya ^a  

^a Oregon State University   (United States)

^b AGILENT TECHNOLOGIES   (United States)

^c UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

Circuit simulation; Coupled circuit and device simulation; Electrostatic mechanical simulator; Microelectromechanical systems (MEMS) capacitor; Microelectromechanical systems voltage controlled oscillator (MEMS VCO); Noise simulation; Phase noise; Radio frequency voltage controlled oscillator (RF VCO)

Indexed keywords

BROWNIAN MOVEMENT; CAPACITANCE; CAPACITORS; COMPUTER SIMULATION; MATHEMATICAL MODELS; SPURIOUS SIGNAL NOISE; VARIABLE FREQUENCY OSCILLATORS;

CIRCUIT SIMULATION; ELECTROSTATIC MECHANICAL SIMULATOR; MICROELECTROMECHANICAL SYSTEMS (MEMS) CAPACITOR; MICROELECTROMECHANICAL SYSTEMS VOLTAGE CONTROLLED OSCILLATOR; NOISE SIMULATION; PHASE NOISE; RADIO FREQUENCY VOLTAGE CONTROLLED OSCILLATORS (RF VCO);

MICROELECTROMECHANICAL DEVICES;

EID: 18844421594     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2004.839317     Document Type: Article

References (27)

1. S. Senturia, "CAD challenges for microsensors, microactuators, and microsystems," Proc. IEEE, vol. 86, pp. 1611-1626, Aug. 1998.
2. T. Mukherjee, G. K. Fedder, D. Ramaswamy, and J. White, "Emerging simulation approaches for micromachined devices," IEEE Trans. Computer-Aided Design Integr. Circuits Syst., vol. 19, pp. 1572-1588, Dec. 2000.
3. S. D. Senturia, R. M. Harris, B. P. Johnson, K. Songmin, K. Nabors, M. A. Shulman, and J. White, "A computer-aided design system for microelectromechanical systems (MEMCAD)," J. Mircoelectromech. Syst., vol. 1, pp. 3-13, Mar. 1992.
4. K. Nabors and J. White, "FastCap: A multi-pole accelerated 3-D capacitance extraction program," IEEE Trans. Computer-Aided Design Integr. Circuits Syst., vol. 10, pp. 1447-1459, Nov. 1991.
5. J. M. Funk, J. G. Korvinkj, J. Buhler, M. Bachtold, and H. Baltes, "SOLIDIS: A tool for microactuator simulation in 3-D," J. Mircoelectromech. Syst., vol. 6, pp. 70-82, Mar. 1997.
6. S. Crary and Y. Zhang, "CAEMEMS: An integrated computer-aided engineering workbench for micro-electro-mechanical systems," in Proc. IEEE Micro Electro Mechanical Systems, Feb. 1990, pp. 113-114.
7. N. R. Aluru and J. White, "A multi-level Newton method for mixedenergy domain simulation of MEMS," J. Mircoelectromech. Syst., vol. 8, pp. 299-308, Sep. 1999.
8. N. R. Aluru and J. White, "An efficient numerical technique for electromechanical simulation of complicated micro-electro-mechanical-structures," Sens. Actuators A, Phys., vol. 58, pp. 1-11, 1997.
9. G. Li and N. R. Aluru, "Efficient mixed-domain analysis of electrostatic MEMS," IEEE Trans. Computer-Aided Design Integr. Circuits Syst., vol. 22, pp. 1228-1242, Sep. 2003.
10. S. K. De and N. R. Aluru, "Full-Lagrangian schemes for dynamic analysis of electrostatic MEMS," J. Microelectromech. Syst., vol. 13, pp. 737-758, Oct. 2004.
11. G. Li and N. R. Aluru, "A Lagrangian approach for electrostatic analysis of deformable conductors," J. Microelectromech. Syst., vol. 11, pp. 245-254, Jun. 2002.
12. A. Dec and K. Suyama, "Micromachined electromechanically tunable capacitors and their applications to RF ICs," IEEE Trans. Microwave Theory Tech., vol. 46, pp. 2587-2595, Dec. 1998.
13. J. Zou, C. Liu, J. Schutt-Aine, J. Chen, and S. Kang, "Development of a wide tuning capacitor for wireless communications systems," in Proc. IEDM'00 Tech. Digest, Dec. 2000, pp. 403-406.
14. D. Young and B. E. Boser, "A micromachined-based RF low-noise voltage-controlled oscillator," in Proc. CICC-97, May 1997, pp. 431-434.
15. A. Dec and K. Suyama, "Microwave MEMS-based voltage-controlled oscillators," IEEE Trans. Microwave Theory Tech., vol. 48, pp. 1943-1949, Nov. 2000.
16. T. L. Quarles, "The SPICE3 Implementation Guide," Electronics Research Laboratory, University of California, Berkeley, CA, Memo no. UCB/ERL M89/ 44, Nov. 1989.
17. J. M. Huang, K. M. Liew, C. H. Wong, S. Rajendran, M. J. Tan, and A. Q. Liu, "Mechanical design and optimization of capacitive micromachined switch," Sens. Actuators A, Phys., vol. 93, pp. 273-285, 2001.
18. F. D. Bannon, III, J. R. Clark, and C. T.-C. Nguyen, "High frequency microelectromechanical IF filters," in Proc. IEDM'96 Tech. Digest, Dec. 1996, pp. 773-776.
19. A. C. Wong, H. Ding, and C. T.-C. Nguyen, "Micromechanical mixers-filters," in Proc. IEDM'98 Tech. Digest, Dec. 1998, pp. 471-474.
20. J. R. Clark, F. D. Bannon, III, A.-C. Wong, and C. T.-C. Nguyen, "Parallel-resonator HF micromechanical bandpass filters," in Proc. Transducers'97, vol. 2, June 1997, pp. 1161-1164.
21. D. J. Young, "Micromechanical Devices and Fabrication Technologies for Radio-Frequency Analog Signal Processing," Ph.D. dissertation, Univ. of California, Berkeley, CA, 1999.
22. G. M. Rebeiz, RF MEMS Theory, Design, and Technology. New York: Wiley, 2003.
23. T. B. Gabrielson, "Mechanical-thermal noise in micromachined acoustic and vibration sensors," IEEE Trans. Electron Devices, vol. 40, pp. 903-909, May 1993.
24. A. Demir, A. Mehrotra, and J. Roychowdhury, "Phase noise in oscillators: A unifying theory and numerical methods for characterization," IEEE Trans. Circuit Syst.-I, vol. 47, pp. 655-674, May 2000.
25. A. Demir, "Phase noise in oscillators: DAE's and colored noise sources," in Proc. IEEE/ACM Int. Conf. CAD, Nov. 1998, pp. 170-177.
26. A. Demir, "Floquent theory and nonlinear perturbation analysis for oscillators with differential-algebraic equations," International Journal of Circuit Theory and Applications, pp. 163-185, Mar.-Apr. 2000.
27. V. Kratyuk, "Algorithms and Tools for Optimization of Integrated RF VCOs," M.S. thesis, Oregon State University, Corvallis, Jun. 2003.