Multilevel Newton method for mixed-energy domain simulation of MEMS

Journal of Microelectromechanical Systems

Volumn 8, Issue 3, 1999, Pages 299-308

  Aluru, N R ^a   White, Jacob ^b  

^a University of Illinois at Urbana Champaign   (United States)

^b USA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; COMPUTER SIMULATION;

NEWTON METHODS;

MICROELECTROMECHANICAL DEVICES;

EID: 0032594984     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.788634     Document Type: Article

References (15)

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