|
Volumn 73, Issue 8, 2002, Pages 2974-
|
Characterization of a high-density, direct-current reflex discharge plasma source operating in AR and N2
|
Author keywords
[No Author keywords available]
|
Indexed keywords
|
EID: 0036684182
PISSN: 00346748
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1493234 Document Type: Article |
Times cited : (18)
|
References (0)
|