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Volumn 34, Issue 18, 2001, Pages 2726-2733
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Rf probe technology for the next generation of technological plasmas
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Author keywords
[No Author keywords available]
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Indexed keywords
AMPLIFICATION;
BANDWIDTH;
HARMONIC ANALYSIS;
MATHEMATICAL MODELS;
PLASMA DEVICES;
SIGNAL INTERFERENCE;
THERMAL NOISE;
PLASMA PHASE DELAY;
PLASMA PROBES;
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EID: 0035929082
PISSN: 00223727
EISSN: None
Source Type: Journal
DOI: 10.1088/0022-3727/34/18/303 Document Type: Article |
Times cited : (15)
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References (17)
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