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Plasma Sources Science and Technology

Volumn 10, Issue 1, 2001, Pages 43-51

Time-resolved current and voltage measurements on a pulsed rf inductively coupled plasma

(2) Guo, Wei a DeJoseph Jr , Charles A b

a INNOVATIVE SCIENTIFIC SOLUTIONS INC (United States)

b AIR FORCE RESEARCH LABORATORY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; CATHODE RAY OSCILLOSCOPES; ELECTRIC CURRENT MEASUREMENT; FOURIER TRANSFORMS; INDUCTIVELY COUPLED PLASMA; PROBES; VOLTAGE MEASUREMENT;

DIGITAL OSCILLOSCOPE; LANGMUIR PROBE MEASUREMENTS; PLASMA EMISSION; RADIO FREQUENCY;

PLASMAS;

EID: 0342420603 PISSN: 09630252 EISSN: None Source Type: Journal
DOI: 10.1088/0963-0252/10/1/307 Document Type: Article

Times cited : (33)

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