Electrical and optical characterization of capacitively and inductively coupled GEC reference cells

Vacuum

Volumn 56, Issue 1, 2000, Pages 3-8

  Graham, W G ^a   Mahony, C M O ^a   Steen, P G ^a  

^a QUEEN'S UNIVERSITY BELFAST   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC DISCHARGES; ELECTRIC POWER MEASUREMENT; ELECTRON TRANSITIONS; LIGHT EMISSION;

LANGMUIR PROBE;

PLASMA HEATING;

EID: 0033874235     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(99)00159-1     Document Type: Article

References (13)

1. Olthoff JK, editor. Gaseous Electronics Conference RF Reference Cell. J Res Natl Stand Technol 1995;100.
2. Hargis P.J.et al. Rev Sci Instrum. 65:1994;140.
3. Miller P.A.et al. J Res Natl Stand Technol. 100:1995;427.
4. Sobolewski M.A. J Res Natl Stand Technol. 100:1995;341.
5. Mahony C.M.O., Al Wazzan R., Graham W.G. Appl Phys Lett. 71:1997;608.
6. Savas S.E., Donohoe G. Rev Sci Instrum. 60:1989;3391.
7. Godyak V.A., Piejak R.B., Alexandrovich B.M. Plasma Sources Sci Technol. 1:1992;37.
8. Hopkins M.B., Graham W.G. Rev Sci Instrum. 57:1986;2210.
9. Mahony C.M.O., McFarland G., Steen P.G., Graham W.G. Appl Phys Lett. 75:1995;331.
10. Godyak V.A., Piejak R.B. Phys. Rev. Lett. 65:1990;996.
11. Turner M.M., Hopkins M.B. Phys Rev Lett. 69:1992;3511.
12. Overzet L.J. Res Natl Stand Technol. 100:1995;401.
13. Hopkins M.B. J Res Natl Stand Technol. 100:1995;415.