Experimental studies of H2/Ar plasma in a planar inductive discharge

Plasma Sources Science and Technology

Volumn 7, Issue 3, 1998, Pages 330-336

  Gudmundsson, J T ^a,b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b UNIVERSITY OF ICELAND   (Iceland)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; ELECTRIC DISCHARGES; ELECTRON DENSITY MEASUREMENT; HYDROGEN; IONS; MASS SPECTROMETRY; PLASMA PROBES; TEMPERATURE MEASUREMENT; VOLTAGE MEASUREMENT;

ELECTRON ENERGY PROBABILITY FUNCTION (EEPF); ELECTRON TEMPERATURE; INDUCTIVE DISCHARGES;

PLASMA DIAGNOSTICS;

EID: 0032136550     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/7/3/011     Document Type: Article

References (27)

1. Ditizio R A, Liu G, Fonash S J, Hseih B-C and Greve D W 1990 Appl. Phys. Lett. 56 1140-2
2. Bernstein J D, Qin S, Chan C and King T-J 1996 IEEE Trans. Electron Devices ED-43 1876-82
3. Liu G and Fonash S J 1993 Appl. Phys. Lett. 62 2554-6
4. Cielaszyk E S, Kirmse K H R, Stewart R A and Wendt A E 1995 Appl. Phys. Lett. 67 3099-101
5. Hopwood J 1992 Plasma Sources Sci. Technol. 1 109-16
6. Keller J H, Forster J C and Barnes M S 1993 J. Vac. Sci. Technol. A 11 2487-91
7. Hopwood J, Guarnieri C R, Whitehair S J and Cuomo J J 1993 J. Vac. Sci. Technol. A 11 152-6
8. Wainman P N, Lieberman M A, Lichtenberg A J, Stewart R A and Lee C 1995 J. Vac. Sci. Technol. A 13 2464-9
9. Barnes M S, Forster J C and Keller J H 1993 Appl. Phys. Lett. 62 2622-4
10. Mahoney L J, Wendt A E, Barrios E, Richards C J and Shohet J L 1994 J. Appl. Phys. 76 2041-7
11. Godyak V A, Piejak R B and Alexandrovich B M 1995 Plasma Sources Sci. Technol. 4 332-6
12. Berlemont P, Skinner D A and Bacal M 1993 Rev. Sci. Instrum. 64 2721-8
13. Graham W G 1995 Plasma Sources Sci. Technol. 4 281-92
14. Matveyev A A and Silakov V P 1995 Plasma Sources Sci. Technol. 4 606-17
15. Godyak V A, Piejak R B and Alexandrovich B M 1992 Plasma Sources Sci. Technol. 1 36-58
16. Druyvesteyn M J 1930 Z. Phys. 64 781-98
17. Lieberman M A and Lichtenberg A J 1994 Principles of Plasma Discharges and Materials Processing (New York: Wiley) p 177
18. Gudmundsson J T 1997 Electron Research Laboratory, University of California, Berkeley, Memorandum UCB/ERL M97/38
19. Rundle H W, Clark D R and Deckers J M 1973 Can. J. Phys. 51 144-8
20. Gudmundsson J T and Lieberman MA 1998 Plasma Sources Sci. Technol. 7 1-12
21. Canosa A, Gomet J C, Rowe B R, Mitchell J B A and Queffelec J L 1992 J. Chem. Phys. 97 1028-37
22. Straub H C, Renault P, Lindsay B G, Smith K A and Stebbings R F 1996 Phys. Rev. A 54 2146-53
23. Giese C F and Maier W B 1963 J. Chem. Phys. 39 739-48
24. Janev R K, Langer W D, Post D E and Evans K 1987 Atomic and Molecular Processes in Hydrogen-Helium Plasmas (Berlin: Springer)
25. Godyak V A and Maximov V N 1977 Vest. Moskovsk. Univ., Ser. Phys. Astron. 18 51-6
26. Godyak V A 1986 Soviet Radio Frequency Discharge Research (Falls Church, VA: Delphic)
27. Book DL 1990 NRL Plasma Formulary (Washington, DC: Naval Research Laboratory)