A novel self-aligned vertical electrostatic combdrives actuator for scanning micromirrors

Journal of Micromechanics and Microengineering

Volumn 15, Issue 4, 2005, Pages 855-860

  Tsou, C ^a   Lin, W T ^b   Fan, C C ^b   Chou, Bruce C S ^b  

^a FENG CHIA UNIVERSITY   (Taiwan)

^b LighTuning Technology Inc   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; MICROELECTROMECHANICAL DEVICES; MIRRORS; NATURAL FREQUENCIES; SCANNING; SILICON ON INSULATOR TECHNOLOGY;

BONDING TECHNOLOGY; ELECTROSTATIC COMBDRIVES; MICROMIRRORS; OPTICAL APPLICATIONS;

ELECTROSTATIC DEVICES;

EID: 17444428654     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/4/025     Document Type: Article

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