Large-displacement vertical microlens scanner with low driving voltage

IEEE Photonics Technology Letters

Volumn 14, Issue 11, 2002, Pages 1572-1574

  Kwon, Sunghoon ^a,b   Milanović, Veljko ^a,c   Lee, Luke P ^b  

^a IEEE

^b University of California at Berkeley   (United States)

^c Adriatic Research Institute   (United States)

Author keywords

Integrated optics; Microlens scanner; Microoptics; Microoptoelectromechanical systems; Silicon on insulator; Variable focus; Vertical comb drive

Indexed keywords

LENSES; MICROELECTROMECHANICAL DEVICES; MICROOPTICS; SILICON ON INSULATOR TECHNOLOGY;

MICROLENS SCANNER; MICROOPTOELECTROMECHANICAL DEVICES; VARIABLE FOCUS;

INTEGRATED OPTICS;

EID: 0036851061     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/LPT.2002.803331     Document Type: Article

References (11)

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