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Volumn 10, Issue 4, 2001, Pages 561-568

An angle-based design approach for rectangular electrostatic torsion actuators

Author keywords

Angle based design approach; Rectangular electrostatic torsion actuators

Indexed keywords

COMPUTER AIDED DESIGN; COMPUTER SIMULATION; MICROELECTROMECHANICAL DEVICES; PERMITTIVITY; TORQUE; TORSIONAL STRESS;

EID: 0035586839     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.967379     Document Type: Article
Times cited : (57)

References (12)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.