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Volumn 10, Issue 4, 2001, Pages 561-568
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An angle-based design approach for rectangular electrostatic torsion actuators
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Author keywords
Angle based design approach; Rectangular electrostatic torsion actuators
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Indexed keywords
COMPUTER AIDED DESIGN;
COMPUTER SIMULATION;
MICROELECTROMECHANICAL DEVICES;
PERMITTIVITY;
TORQUE;
TORSIONAL STRESS;
ELECTROSTATIC TORSION ACTUATORS;
ELECTROSTATIC ACTUATORS;
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EID: 0035586839
PISSN: 10577157
EISSN: None
Source Type: Journal
DOI: 10.1109/84.967379 Document Type: Article |
Times cited : (57)
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References (12)
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