Batch-fabricated scanning micromirrors using localized plastic deformation of silicon

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2004, Pages 494-497

  Kim, Jongbaeg ^a   Lin, Liwei ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BATCH-PROCESSED SCANNING MICROMIRRORS; ELECTROSTATIC COMB-DRIVE ACTUATORS; LOCALIZATION; TORSIONAL SCANNING; WAFER-BONDING PROCESSES;

BRITTLENESS; BUCKLING; HEATING; MIRRORS; PARAMETER ESTIMATION; PLASTIC DEFORMATION; PROBLEM SOLVING; RELIABILITY; SCANNING; SILICON; SINGLE CRYSTALS; STRESS ANALYSIS; THERMAL EXPANSION;

MICROACTUATORS;

EID: 3042784660     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. Conant, R.A.; Nee, J.T.; Lau, K.Y.; Muller, R.S., "A flat high-frequency scanning micromirror.", Technical Digest. Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, USA, 4-8 June 2000. p.6-9
2. Patterson, P.R.; Dooyoung Hah; Hung Nguyen; Toshiyoshi, H.; Ru-min Chao; Wu, M.C., "A scanning micromirror with angular comb drive actuation,", Fifteenth IEEE International Conference on Micro Electro Mechanical Systems, Las Vegas, NV, USA, 20-24 Jan. 2002. p.544-547
3. Kim, J., Choo, H., Lin, L., Muller, R. S., "Microfabricated Torsional Actuator by Self-Aligned Plastic Deformation", Transducers'03: The 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Boston, MA, USA, 2003. pp1015-1018
4. Y.T. Cheng, Liwei Lin and Khalil Najafi, "Localized Silicon Fusion and Eutectic Bonding for MEMS Fabrication and Packaging," IEEE/ASME Journal of Microelectro-mechanical Systems, Vol. 9, pp. 3-8, March 2000.
5. O. Englander, D. Christensen, M. Chiao, J. Kim and L. Lin, "Localized Synthesis of Silicon Nanowires," 12th Int. Conference on Solid State Sensors and Actuators, Transducers'03, pp. 186-189, Boston, June 2003.
6. D. Christensen, O. Englander, J. Kim, and L. Lin, "Room Temperature Local Synthesis of Carbon Nanotubes," IEEE-Nano 2003, San Francisco, August 2003, pp.581-584.
7. J. R. Patel, A. R. Chaudhuri, "Macroscopic plastic properties of dislocation-free germanium and other semiconductor crystals", Journal of Applied Physics, 34 No.9 1963, pp.2788-2799.
8. E. Gartner, J. Fruhauf, B. Hannemann, E. Jansch, "Mounting of Si-chips with plastically bent cantilevers", TRANSDUCERS '01. EUROSENSORS XV. 11th International Conference on Solid-State Sensors and Actuators. 1, 2001, pp.206-209.