A self-aligned vertical comb-drive actuator using surface micromachining for scanning micromirrors

2003 IEEE/LEOS International Conference on Optical MEMS

Volumn , Issue , 2003, Pages 151-152

  Hah, Dooyoung ^a   Choi, Chang Auck ^a   Jun, Chi Hoon ^a   Kim, Youn Tae ^a  

^a Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

Author keywords

Actuators; Etching; Fabrication; Fingers; Micromachining; Micromirrors; Mirrors; Optical microscopy; Silicon on insulator technology; Voltage

Indexed keywords

ACTUATORS; COMPOSITE MICROMECHANICS; ELECTRIC POTENTIAL; ETCHING; FABRICATION; MICROMACHINING; MIRRORS; MOEMS; OPTICAL MICROSCOPY; SURFACE MICROMACHINING;

FINGERS; MICRO MIRROR; SELF-ALIGNED; TILT ANGLE; TILT SCANNING; TWO-AXIS; VERTICAL COMB-DRIVE ACTUATOR;

SILICON ON INSULATOR TECHNOLOGY;

EID: 84946228220     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2003.1233511     Document Type: Conference Paper

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