Piezoelectric micromachined ultrasonic transducers: Modeling the influence of structural parameters on device performance

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 52, Issue 3, 2005, Pages 455-468

  Akasheh, Firas ^a   Fraser, John D ^b   Bose, Susmita ^a   Bandyopadhyay, Amit ^a  

^a Washington State University   (United States)

^b PHILIPS HEALTHCARE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COUPLING COEFFICIENTS; ELECTRODE DESIGN; PARALLEL-PLATE CAPACITORS; VOLUMETRIC IMAGING;

BANDWIDTH; ELECTROSTATICS; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MICROMACHINING; PARAMETER ESTIMATION; PIEZOELECTRIC DEVICES; ULTRASONIC DEVICES;

TRANSDUCERS;

EID: 17044371257     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2005.1417268     Document Type: Article

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