Characterisation and comparison of a cMUT versus a piezoelectric transducer for air applications

Proceedings of the IEEE Ultrasonics Symposium

Volumn 2, Issue , 2002, Pages 1023-1026

  Törndahl, Marcus ^a   Almqvist, Monica ^a   Wallman, Lars ^a   Persson, Hans W ^a   Lindström, Kjell ^a  

^a LUND INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC MATERIALS; DIFFRACTION; NATURAL FREQUENCIES; PIEZOELECTRIC TRANSDUCERS; POLYMERIC MEMBRANES; SILICON; TOMOGRAPHY; WAVEFORM ANALYSIS;

CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER; CAVITY SIZE; MEMBRANE THICKNESS;

ULTRASONIC TRANSDUCERS;

EID: 0036990242     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2002.1192469     Document Type: Conference Paper

References (3)

1. Eccardt, P-C., Niederer, K., Scheiter, T., and Hierold, C. Surface Micromachined ultrasound transducers in CMOS technology. IEEE Ultrasonics Symp. Proc., 1996, Vol. 2, p. 959-962, IEEE, NY, (1996).
2. Almqvist, M., Holm, A., Persson, H.W. and Lindström, K. Characterization of air-coupled ultrasound transducers in the frequency range 40 kHz-2MHz using light diffraction tomography. Ultrasonics Vol 37, p. 565-575, 2000.
3. Schindel, D. W., Hutchins, D. A., Zou, L. and Sayer, M. The design and Characterization of micromachined air-coupled capacitance transducers. IEEE Transactions on ultrasonics, ferroelectrics and frequency control. Vol. 42, No 1, p 42-50, 1995.