Broadband capacitive micromachined ultrasonic transducers ranging from 10 kHz to 60 MHz for imaging arrays and more

Proceedings of the IEEE Ultrasonics Symposium

Volumn 2, Issue , 2002, Pages 1039-1043

  Ergun, Arif S ^a   Huang, Yongli ^a   Cheng, Ching H ^a   Oralkan, Ömer ^a   Johnson, Jeremy ^a   Jagannathan, Hemanth ^a   Demirci, Utkan ^a   Yaralioǧlu, Göksen G ^a   Karaman, Mustafa ^a   Khuri Yakub, Butrus T ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; ELECTRIC POTENTIAL; ELECTROSTATICS; NATURAL FREQUENCIES; PERMITTIVITY; SILICON WAFERS; SUBSTRATES; ULTRASONIC IMAGING;

CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER; ELECTROMECHANICAL COUPLING EFFICIENCY; FRACTIONAL IMMERSION BANDWIDTH;

ULTRASONIC TRANSDUCERS;

EID: 0036989265     PISSN: 10510117     EISSN: None     Source Type: Journal    
DOI: 10.1109/ULTSYM.2002.1192473     Document Type: Article

References (10)

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