Piezoelectric micromachined ultrasonic transducers based on PZT films

Materials Research Society Symposium - Proceedings

Volumn 741, Issue , 2002, Pages 273-278

  Baborowski, Jacek ^a   Ledermann, Nicolas ^a   Muralt, Paul ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRYSTALLIZATION; INTERFEROMETERS; LIQUID INSULATING MATERIALS; MICROMACHINING; PIEZOELECTRIC MATERIALS; SEMICONDUCTING LEAD COMPOUNDS; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; SOL-GELS; ULTRASONIC TRANSDUCERS;

CANTILEVER BENDING METHOD; LEAD ZIRCONIUM TITANATE; SILICON MEMBRANE;

THIN FILMS;

EID: 0043011391     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-741-j12.4     Document Type: Conference Paper

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