Development of silicon ultrasonic transducer using micromachining

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4176, Issue 1, 2000, Pages 244-252

  Caliano, G ^a   Galanello, F ^a   Foglietti, V ^b   Cianci, E ^b   Caronti, A ^a  

^a ROMA TRE UNIVERSITY   (Italy)

^b CNR   (Italy)

Author keywords

Capacitive; cMUT; Micromachined; Transduce; Ultrasonic

Indexed keywords

CAPACITORS; ELECTRODES; MICROMACHINING; PIEZOELECTRICITY; SILICON;

CAPACITATIVE MICROMACHINED ULTRASONIC TRANSDUCERS (CMUT);

ULTRASONIC TRANSDUCERS;

EID: 0034547218     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.395636     Document Type: Article

References (0)