Capacitive micromachined ultrasonic transducers and their application

Proceedings of the IEEE Ultrasonics Symposium

Volumn 2, Issue , 2001, Pages 933-940

  Buhrdorf, A ^a   Ahrens, O ^a   Binder, J ^a  

^a UNIVERSITY OF BREMEN   (Germany)

Author keywords

cMUT application; Parasitic capacitance; Polysilicon membrane; Surface micromachining

Indexed keywords

MICROMACHINING; POLYMERIC MEMBRANES; POLYSILICON; SURFACE TREATMENT; TECHNOLOGY; ULTRASONIC APPLICATIONS;

CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER; CMUT APPLICATION; PARASITIC CAPACITANCE; ULTRASONIC TECHNOLOGY;

ULTRASONIC TRANSDUCERS;

EID: 0035728831     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (17)

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