Static and electrically actuated shaped MEMS mirrors

Journal of Microelectromechanical Systems

Volumn 14, Issue 1, 2005, Pages 29-36

  Mi, Bin ^a   Smith, David A ^a   Kahn, Harold ^a   Merat, Frank L ^a   Heuer, Arthur H ^a   Phillips, Stephen M ^a,b  

^a Case Western Reserve University   (United States)

^b AZ 85281   (United States)

Author keywords

Curvature modulation; Microelectromechanical systems (MEMS); Micromirror; Multilayer; Optical switch

Indexed keywords

COMPUTER SIMULATION; ELECTRIC POTENTIAL; FINITE ELEMENT METHOD; INTERFEROMETERS; LIGHT MODULATION; MATHEMATICAL MODELS; MICROMACHINING; MIRRORS; OPTICAL DESIGN; OPTICAL SWITCHES; POLYSILICON; STRESSES;

CURVATURE MODULATION; MICROMIRROR; MULTIPOLY PROCESS;

MICROELECTROMECHANICAL DEVICES;

EID: 14044257169     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2004.839022     Document Type: Article

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