Large-deflection out-of-plane electrostatic buckled-electrode actuators

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 794-797

  Kim, H S ^a   Najafi, K ^a   Washabaugh, P D ^a   Bernal, L P ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Biomembranes; Electrodes; Electrostatic actuators; Fabrication; Force sensors; Microelectromechanical devices; Portable computers; Stress; Transducers; Voltage control

Indexed keywords

ACTUATORS; DEFLECTION (STRUCTURES); ELECTRODES; ELECTROSTATIC DEVICES; ELECTROSTATICS; FABRICATION; MICROCOMPUTERS; MICROELECTROMECHANICAL DEVICES; MICROSYSTEMS; SOLID-STATE SENSORS; STRESSES; TRANSDUCERS; VOLTAGE CONTROL; WAFER BONDING;

BIOMEMBRANES; FORCE SENSOR; OUT-OF-PLANE DEFLECTION; PARALLEL-PLATE ELECTRODES; PARALLEL-PLATE ELECTROSTATIC ACTUATORS; PARYLENE MEMBRANES; POLYMER ELECTRODES; PORTABLE COMPUTERS;

ELECTROSTATIC ACTUATORS;

EID: 14044249473     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215593     Document Type: Conference Paper

References (5)

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3. T-K A. Chou and K. Najafi, "Fabrication of Out-of-Plane Curved Surfaces in Si By Utilizing RIE Lag," MEMS '02, pp.145-148, 2002.
4. H. S. Kim and K. Najafi, "Wafer Bonding Using Parylene and Wafer-Level Transfer of Free-Standing Parylene Memebranes", Transducers '03, 2003.
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