A novel electrostatic actuator for micro deformable mirrors: Fabrication and test

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 488-491

  Divoux, C ^a   Charton, J ^b   Schwartz, W ^a,b,c   Stadler, E ^b   Margail, J ^a   Jocou, L ^b   Enot, T ^a   Barbe, J C ^a   Chiaroni, J ^a   Berruyer, P ^a  

^a CEA LETI   (France)

^b LABORATOIRE D ASTROPHYSIQUE   (France)

^c Compagnie Industrielle des Lasers ^*  (France)

Author keywords

Adaptive optics; Astronomy; Biomembranes; Collaboration; Electrostatic actuators; Linearity; Mirrors; Optical device fabrication; Testing; Wafer bonding

Indexed keywords

ACTUATORS; ADAPTIVE OPTICS; ASTRONOMY; DEFORMATION; ELECTROSTATIC DEVICES; ELECTROSTATICS; MICROSYSTEMS; MIRRORS; OPTICAL TESTING; SILICON WAFERS; SOLID-STATE SENSORS; TESTING; TRANSDUCERS; WAFER BONDING;

ADAPTIVE OPTICS SYSTEMS; BIOMEMBRANES; COLLABORATION; INNOVATIVE PROCESS; LINEARITY; MICRO-DEFORMABLE MIRROR; OPTICAL DEVICE FABRICATION; QUASI STATIC RESPONSE;

ELECTROSTATIC ACTUATORS;

EID: 84944726032     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215360     Document Type: Conference Paper

References (5)

1. MOEMS spatial light modulator development at the Center for Adaptive Optics - P. Krulevitch & al . - Proceedings of SPIE, MOEMS Display and Imaging System vol. 4985, 172-179, January 2003.
2. Improved Vision by Eye Aberration Correction using an active-Matrix Addressed Micromirror Array - A. Gehner & al. - Proceedings of SPIE, MOEMS Display and Imaging System vol. 4985, 180-192, January 2003.
3. Deformable mirrors flex low-cost potential - OLE - OLE May 2001, 37-39, 2001.
4. A Micromachined Deformable Mirror for Adaptive Optics - W. Schwartz et al. - Proceedings of SPIE, MOEMS Display and Imaging System vol. 4985, 230-241, January 2003.
5. rd International Workshop on Adaptive Optics for Industry and Medicine, W. Schwartz et al. , 139-143, 2002.