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Volumn , Issue , 2001, Pages 925-928
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Dynamic macromodeling of MEMS mirror devices
a
a
Steve)
(United States)
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Author keywords
Dynamic macromodeling; MEMS mirror; Squeeze film damping
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Indexed keywords
COMPUTER SIMULATION;
ELECTRODES;
ELECTROSTATICS;
EQUATIONS OF MOTION;
FINITE DIFFERENCE METHOD;
MATHEMATICAL MODELS;
MIRRORS;
TORQUE;
DYNAMIC MACROMODELING;
MICROELECTROMECHANICAL SYSTEM MIRROR DEVICES;
SQUEEZE-FILM DAMPING;
MICROELECTROMECHANICAL DEVICES;
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EID: 0035717952
PISSN: 01631918
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (7)
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References (8)
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