Instability in micromachined electrostatic torsion actuators with full travel range

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 2, Issue , 2003, Pages 1431-1434

  Xiao, Zhixiong ^a   Farmer, K R ^a  

^a NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Electrodes; Electrostatic actuators; Electrostatic measurements; Glass; Insulation; Moisture; Nitrogen; Silicon; Stability; Voltage

Indexed keywords

ACTUATORS; CONVERGENCE OF NUMERICAL METHODS; ELECTRIC POTENTIAL; ELECTRODES; ELECTROSTATICS; GLASS; INSULATION; MICROSYSTEMS; MOISTURE; NITROGEN; PLATES (STRUCTURAL COMPONENTS); SILICON; SILICON OXIDES; SILICON WAFERS; SINGLE CRYSTALS; SOLID-STATE SENSORS; SUBSTRATES; TORSIONAL STRESS; TRANSDUCERS;

ELECTROSTATIC MEASUREMENTS; GLASS SUBSTRATES; GROUND SHIELDS; IMPROVED STRUCTURES; INSULATING SURFACES; OXIDIZED SILICON; SINGLE CRYSTAL SILICON; TORSION ACTUATORS;

ELECTROSTATIC ACTUATORS;

EID: 6344246865     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1217044     Document Type: Conference Paper

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