Design and Fabrication of Curved Micromirrors Using the Multipoly Process

Proceedings of IEEE Sensors

Volumn 2, Issue 1, 2003, Pages 42-45

  Mi, Bin ^a   Kahn, Harold ^a   Merat, Frank ^a   Heuer, Arthur H ^a   Smith, David A ^a   Phillips, Stephen M ^a  

^a Case Western Reserve University   (United States)

Author keywords

Adaptive Optics; MEMS; Micromirrors; MultiPoly; Stress Gradient

Indexed keywords

MICROMIRRORS; MULTIPOLY; STRESS GRADIENT;

ADAPTIVE OPTICS; CHEMICAL VAPOR DEPOSITION; MICROELECTROMECHANICAL DEVICES; MICROSCOPIC EXAMINATION; MIRRORS; OPTICAL SWITCHES; OPTIMIZATION; POLYSILICON; TENSILE STRESS; TRANSDUCERS;

MICROMACHINING;

EID: 1542304389     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)

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