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Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2002, Pages 511-515

A novel high-speed piezoelectric deformable varifocal mirror for optical applications

(3) Mescher, Mark J a Vladimer, Michael L a Bernstein, Jonathan J a

a CHARLES STARK DRAPER LABORATORY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; FINITE ELEMENT METHOD; FOCUSING; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; PIEZOELECTRIC DEVICES; SEMICONDUCTING LEAD COMPOUNDS; THIN FILMS; TUNING;

FOCAL LENGTH; LEAD ZIRCONIUM TITANATE; MECHANICAL BANDWIDTH; PARABOLIC FOCUSING MIRROR; PIEZOELECTRIC DEFORMABLE VARIFOCAL MIRROR;

MIRRORS;

EID: 0036120526 PISSN: None EISSN: None Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper

Times cited : (24)

References (13)

1
- 84975569681
- Spherical mirror with piezoelectrically controlled curvature
- December
- (1977) Applied Optics , vol.16 , pp. 3075
- Adelman, N.T.¹

2
- 0018444908
- Bimorph piezoelectric flexible mirror
- March
- (1979) J. Opt. Soc. Am. , vol.69 , pp. 487-481
- Steinhaus, E.¹ Lipson, S.G.²

3
- 0018321147
- Analysis of adaptive optical elements made from piezoelectric bimorphs
- Jan.
- (1979) J. Opt. Soc. Am. , vol.69 , pp. 181-187
- Kokorowski, S.A.¹

4
- 0020194567
- Multilayered deformable mirror using PVDF films
- 15 October
- (1982) Applied Optics , vol.21 , pp. 3664-3668
- Sato, T.¹

5
- 0020193482
- Deformable 2-D mirror using multilayered electrostrictros
- 15 October
- (1982) Applied Optics , vol.21 , pp. 3669-3672
- Sato, T.¹

6
- 0027886046
- Fabrication and characterization of micromachined deformable mirror for adaptive optics applications
- (1993) Proc. SPIE , vol.1954 , pp. 421-430
- Miller, L.M.¹

7
- 84975612628
- Flexible mirror micromachined in silicon
- (1995) Applied Optics , vol.34 , pp. 2968-2972
- Vdovin, G.V.¹ Sarro, P.M.²

8
- 0029512669
- Basic characteristics of a piezoelectric buckling type of actuator
- The Eighth International Conference on Solid-State Sensors and Actuators - Transducers '95, Stockholm, Sweeden, 25-29 June 1995
- Sakata, M.¹

9
- 0032224308
- Variable focal length microelectromechanical lens
- (1998) SPIE - The International Society for Optical Engineering Conference , vol.3289 , pp. 171-176
- Mescher, M.¹

10
- 0033294039
- Advanced MEMS ferroelectric ultrasound 2D arrays
- (1999) IEEE Ultrasonics Symposium , vol.2 , pp. 1145-1153
- Bernstein, J.J.¹ Bottari, J.²

11
- 0025862618
- Ferroelectric thin film ultrasonic micromotors
- (1991) Proceedings of the 4th IEEE Workshop on MicroElectroMechanical Systems (MEMS-91), Nara, Japan , pp. 109-113
- Udayakumar, K.R.¹

12
- 0006363631
- Surface micromachined pressure sensors
- Doctoral Thesis, Univ. New Mexico
- (1997) , pp. 112
- Eaton IV, W.P.¹

13
- 0028406692
- Measurements of the mechanical behavior of micromachined silicon and silicon-nitride membranes for microphones, pressure sensors, and gas flow meters
- (1994) Sensors and Actuators , vol.41-42 , pp. 287-292
- Schellin, R.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.