State of the art in high-resolution SIMS depth profiling

Extended Abstracts of the 2nd International Workshop on Junction Technology, IWJT 2001

Volumn , Issue , 2001, Pages 39-44

  Wittmaack, K ^a  

^a INSTITUTE OF EPIDEMIOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

MASS SPECTROMETRY; SECONDARY ION MASS SPECTROMETRY;

DEPTH RESOLUTION; HIGH RESOLUTION; RECENT PROGRESS; SPUTTER-DEPTH PROFILING; STATE OF THE ART;

DEPTH PROFILING;

EID: 13244298958     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IWJT.2001.993822     Document Type: Conference Paper

References (35)

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