Artifacts in low-energy depth profiling using oxygen primary ion beams: Deoendence on impact angle and oxygen flooding conditions

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 5, 1998, Pages 2776-2785

  Wittmaack, K ^a  

^a INSTITUTE OF EPIDEMIOLOGY   (Germany)

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[No Author keywords available]

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EID: 11744333857     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (29)

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13. + signal increases by a few percent at a depth of about 1.5 μm. This implies that ripple formation is not really disappearing at very high pressures but difficult to identify, probably because of a reduced growth rate.
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25. One of the referees pointed out that, on PHI quadrupole based SIMS systems, the uncertainty in impact angle is closer to ±5°.
26. r=41°±3° for both faces, it is impossible that the root-mean-square amplitude and the wave length of the ripples were almost the same, as implied by Figs. 6.4.b and 1(a) for depths between 5 and 12 μm. Inspection of the quantified 3D AFM images in this thesis shows that the ratio of the mean ripple height h to the ripple spacing s amounted to 0.4±0.05, in accordance with Eq. (1).
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