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Volumn 15, Issue 1, 2005, Pages 81-90

Particulate strengthened Ni-Al2O3 microcomposite HARMs for harsh-environmental micromechanical applications

Author keywords

[No Author keywords available]

Indexed keywords

AGGLOMERATION; ALUMINA; ASPECT RATIO; COMPOSITE MICROMECHANICS; ELECTROPLATING; ENERGY DISPERSIVE SPECTROSCOPY; MICROMACHINING; NICKEL PLATING; POLYMETHYL METHACRYLATES; SCANNING ELECTRON MICROSCOPY; STRENGTH OF MATERIALS; SURFACE ACTIVE AGENTS; TRANSMISSION ELECTRON MICROSCOPY; TRIBOLOGY; VAN DER WAALS FORCES; WEAR RESISTANCE;

EID: 12444307517     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/1/013     Document Type: Article
Times cited : (11)

References (58)
  • 2
    • 0022717983 scopus 로고
    • Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)
    • Becker E W, Ehrfeld W, Hagmann P, Maner A and Münchmeyer D 1986 Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process) Microelectron. Eng. 4 35-56
    • (1986) Microelectron. Eng. , vol.4 , pp. 35-56
    • Becker, E.W.1    Ehrfeld, W.2    Hagmann, P.3    Maner, A.4    Münchmeyer, D.5
  • 4
    • 11744310151 scopus 로고    scopus 로고
    • Recent developments in deep x-ray lithography
    • Ehrfeld W and Schmidt A 1998 Recent developments in deep x-ray lithography J. Vac. Sci. Technol. B 16 3526-34
    • (1998) J. Vac. Sci. Technol. B , vol.16 , pp. 3526-3534
    • Ehrfeld, W.1    Schmidt, A.2
  • 5
    • 0028950885 scopus 로고
    • Deep x-ray lithography for the production of three-dimensional microstructures from metals, polymers and ceramics
    • Ehrfeld W and Lehr H 1995 Deep x-ray lithography for the production of three-dimensional microstructures from metals, polymers and ceramics Radiat. Phys. Chem. 45 349-65
    • (1995) Radiat. Phys. Chem. , vol.45 , pp. 349-365
    • Ehrfeld, W.1    Lehr, H.2
  • 8
    • 0035065426 scopus 로고    scopus 로고
    • Tribology on the macroscale to nanoscale of microelectromechanical system materials: A review
    • Bhushan B 2001 Tribology on the macroscale to nanoscale of microelectromechanical system materials: a review Proc. Institution of Mechanical Engineers Part J J. Eng. Tribol. 215 1-18
    • (2001) Proc. Institution of Mechanical Engineers Part J J. Eng. Tribol. , vol.215 , pp. 1-18
    • Bhushan, B.1
  • 10
    • 0033361372 scopus 로고    scopus 로고
    • SiC MEMS: Opportunities and challenges for applications in harsh environments
    • Mehregany M and Zorman C A 1999 SiC MEMS: opportunities and challenges for applications in harsh environments Thin Solid Films 356 518-24
    • (1999) Thin Solid Films , vol.356 , pp. 518-524
    • Mehregany, M.1    Zorman, C.A.2
  • 11
    • 0032595009 scopus 로고    scopus 로고
    • Fabrication and testing of micromachined silicon carbide and nickel fuel atomizers for gas turbine engines
    • Rajan N, Mehregany M, Zorman C A, Stefanescu S and Kicher T P 1999 Fabrication and testing of micromachined silicon carbide and nickel fuel atomizers for gas turbine engines J. Microelectromech. Syst. 8 251-7
    • (1999) J. Microelectromech. Syst. , vol.8 , pp. 251-257
    • Rajan, N.1    Mehregany, M.2    Zorman, C.A.3    Stefanescu, S.4    Kicher, T.P.5
  • 12
    • 0035368294 scopus 로고    scopus 로고
    • A pin fin microheat sink for cooling macroscale conformal surfaces under the influence of thrust and frictional forces
    • Stephens L S, Kelly K W, Kountouris D and McLean J 2001 A pin fin microheat sink for cooling macroscale conformal surfaces under the influence of thrust and frictional forces J. Microelectromech. Syst. 10 222-31
    • (2001) J. Microelectromech. Syst. , vol.10 , pp. 222-231
    • Stephens, L.S.1    Kelly, K.W.2    Kountouris, D.3    McLean, J.4
  • 14
    • 0012638612 scopus 로고    scopus 로고
    • Tribological investigations of LIGA-microstrucures
    • Bieger T and U W 1996 Tribological investigations of LIGA-microstrucures Microsyst. Technol. 2 63-70
    • (1996) Microsyst. Technol. , vol.2 , pp. 63-70
    • Bieger, T.1    W, U.2
  • 15
    • 0001386350 scopus 로고    scopus 로고
    • Fabrication, metallorgraphic and tribologic investigations of LIGA-microstructures made of nickel-phosphorous alloys
    • Bieger T 1997 Fabrication, metallorgraphic and tribologic investigations of LIGA-microstructures made of nickel-phosphorous alloys Microsyst. Technol. 3 155-63
    • (1997) Microsyst. Technol. , vol.3 , pp. 155-163
    • Bieger, T.1
  • 17
    • 1642329969 scopus 로고    scopus 로고
    • Evaluation of fatigue strength of LIGA nickel film by microtensile tests
    • Son D, Kim J J, Lim T W and K won D 2004 Evaluation of fatigue strength of LIGA nickel film by microtensile tests Scr. Mater. 50 1265-9
    • (2004) Scr. Mater. , vol.50 , pp. 1265-1269
    • Son, D.1    Kim, J.J.2    Lim, T.W.3    Kwon, D.4
  • 18
    • 0344584821 scopus 로고    scopus 로고
    • An investigation of the effects of thickness on mechanical properties of LIGA nickel MEMS structures
    • Lou J, Allameh S, Buccheit T and Soboyejo W O 2003 An investigation of the effects of thickness on mechanical properties of LIGA nickel MEMS structures J. Mater. Sci. 38 4129-35
    • (2003) J. Mater. Sci. , vol.38 , pp. 4129-4135
    • Lou, J.1    Allameh, S.2    Buccheit, T.3    Soboyejo, W.O.4
  • 21
    • 0001656432 scopus 로고    scopus 로고
    • Microstructural and mechanical properties investigation of electrode posited and annealed LIGA nickel structures
    • Buchheit T E, La Van D A, Michael J R, Christenson T R and Leith S D 2002 Microstructural and mechanical properties investigation of electrode posited and annealed LIGA nickel structures Metall. Mater. Trans. A 33 539-54
    • (2002) Metall. Mater. Trans. A , vol.33 , pp. 539-554
    • Buchheit, T.E.1    Van La, D.A.2    Michael, J.R.3    Christenson, T.R.4    Leith, S.D.5
  • 23
    • 0035703367 scopus 로고    scopus 로고
    • Microsample tensile testing of LIGA nickel for MEMS applications
    • Hemker K J and Last H 2001 Microsample tensile testing of LIGA nickel for MEMS applications Mater. Sci. Eng. A 319 882-6
    • (2001) Mater. Sci. Eng. A , vol.319 , pp. 882-886
    • Hemker, K.J.1    Last, H.2
  • 25
    • 0000725322 scopus 로고    scopus 로고
    • Experimental determination of mechanical properties of Ni and Ni-Fe microbars
    • Mazza E, Abel S and Dual J 1996 Experimental determination of mechanical properties of Ni and Ni-Fe microbars Microsyst. Technol. 2 197-202
    • (1996) Microsyst. Technol. , vol.2 , pp. 197-202
    • Mazza, E.1    Abel, S.2    Dual, J.3
  • 28
    • 0011043150 scopus 로고    scopus 로고
    • Microcomposite electroforming for LIGA technology
    • Chou M C, Yang H and Yeh S H 2001 Microcomposite electroforming for LIGA technology Microsyst. Technol. 7 36-9
    • (2001) Microsyst. Technol. , vol.7 , pp. 36-39
    • Chou, M.C.1    Yang, H.2    Yeh, S.H.3
  • 29
    • 0038137194 scopus 로고    scopus 로고
    • High performance nanostructured Ni-Mn alloy for microsystem applications Electrochem
    • Kelly J J, Goods S H and Yang N Y C 2003 High performance nanostructured Ni-Mn alloy for microsystem applications Electrochem. Solid St. Lett. 6 C88-91
    • (2003) Solid St. Lett. , vol.6
    • Kelly, J.J.1    Goods, S.H.2    Yang, N.Y.C.3
  • 31
    • 0029325668 scopus 로고
    • Electrochemical codeposition of inert particles in a metallic matrix
    • Hovestad A and Janssen J J 1995 Electrochemical codeposition of inert particles in a metallic matrix J. Appl. Electrochem. 25 419-527
    • (1995) J. Appl. Electrochem. , vol.25 , pp. 419-527
    • Hovestad, A.1    Janssen, J.J.2
  • 34
    • 0035278579 scopus 로고    scopus 로고
    • Ultra-fine machining tool/molds by LIGA technology
    • Yang H, Pan C T and Chou M C 2001 Ultra-fine machining tool/molds by LIGA technology J. Micromech. Microeng. 11 94-9
    • (2001) J. Micromech. Microeng. , vol.11 , pp. 94-99
    • Yang, H.1    Pan, C.T.2    Chou, M.C.3
  • 35
    • 0142188702 scopus 로고    scopus 로고
    • Nanoparticles to improve mass transport inside deep recesses
    • Panda A and Podlaha E J 2003 Nanoparticles to improve mass transport inside deep recesses Electrochem. Solid-State Lett. C 6 149-52
    • (2003) Electrochem. Solid-State Lett. C , vol.6 , pp. 149-152
    • Panda, A.1    Podlaha, E.J.2
  • 38
    • 0038297569 scopus 로고    scopus 로고
    • Conformal deposition of Ti-C:H coatings over high-aspect-ratio micro-scale structures and tribological characteristics
    • Cao D M, Meng W J, Simko S J, Doll G L, Wang T and Kelly K W 2003 Conformal deposition of Ti-C:H coatings over high-aspect-ratio micro-scale structures and tribological characteristics Thin Solid Films 429 46-54
    • (2003) Thin Solid Films , vol.429 , pp. 46-54
    • Cao, D.M.1    Meng, W.J.2    Simko, S.J.3    Doll, G.L.4    Wang, T.5    Kelly, K.W.6
  • 43
    • 0026119840 scopus 로고
    • Electroforming of metal matrix composite - Dispersoid grain-size dependence of thermostructural and mechanical-properties
    • Verelst M, Bonino J P and Rousset A 1991 Electroforming of metal matrix composite - dispersoid grain-size dependence of thermostructural and mechanical-properties Mater. Sci. Eng. A 135 51-7
    • (1991) Mater. Sci. Eng. A , vol.135 , pp. 51-57
    • Verelst, M.1    Bonino, J.P.2    Rousset, A.3
  • 44
    • 12444345438 scopus 로고    scopus 로고
    • Characterization of high-temperature metal matrix composite coatings
    • ed P K Datta and J S Burnell-Gray (Cambridge: The Royal Society of Chemistry)
    • Marder A R 1997 Characterization of high-temperature metal matrix composite coatings Advances in Surface Engineering III: Engineering Applications ed P K Datta and J S Burnell-Gray (Cambridge: The Royal Society of Chemistry) pp 51-69
    • (1997) Advances in Surface Engineering III: Engineering Applications , pp. 51-69
    • Marder, A.R.1
  • 46
    • 0028443241 scopus 로고
    • New microelectrodes for the investigation of the electroforming of LIGA microstructures
    • Leyendecker K, Bacher W, Start W and Thommes A 1994 New microelectrodes for the investigation of the electroforming of LIGA microstructures Electrochim. Acta 39 1139-43
    • (1994) Electrochim. Acta , vol.39 , pp. 1139-1143
    • Leyendecker, K.1    Bacher, W.2    Start, W.3    Thommes, A.4
  • 49
    • 0001984531 scopus 로고    scopus 로고
    • Amsterdam, The Netherlands: North-Holland
    • Cahn R W and Haasen P 1996 Physical Metallurgy vol III (Amsterdam, The Netherlands: North-Holland)
    • (1996) Physical Metallurgy , vol.3
    • Cahn, R.W.1    Haasen, P.2
  • 50
  • 51
    • 0024065499 scopus 로고
    • Study of the composite electrodeposition of copper with alumina powder
    • Lee C C and Wan C C 1988 Study of the composite electrodeposition of copper with alumina powder J. Electrochem. Soc. 135 1930-3
    • (1988) J. Electrochem. Soc. , vol.135 , pp. 1930-1933
    • Lee, C.C.1    Wan, C.C.2
  • 52
    • 0027541879 scopus 로고
    • Codeposition of Ni-alimuna particles from acid copper sulfate bath
    • Hayashi H, Izumi S Y and Tari 11993 Codeposition of Ni-alimuna particles from acid copper sulfate bath J. Electrochhem. Soc. 140 362-5
    • (1993) J. Electrochhem. Soc. , vol.140 , pp. 362-365
    • Hayashi, H.1    Izumi, S.Y.2    Tari3
  • 54
    • 0015627750 scopus 로고
    • Electron micrographic examination of electrodeposited dispersion-hardened nickel
    • Nwoko V O and Shreir L L 1973 Electron micrographic examination of electrodeposited dispersion-hardened nickel J. Appl. Electrochem. 3 137-41
    • (1973) J. Appl. Electrochem. , vol.3 , pp. 137-141
    • Nwoko, V.O.1    Shreir, L.L.2
  • 57
    • 28844458899 scopus 로고
    • The isoelectrical points of solid oxides, solid hydroxides, and aqueous hydroxo complex systems
    • Parks G 1965 The isoelectrical points of solid oxides, solid hydroxides, and aqueous hydroxo complex systems Chem. Rev. 65 177-98
    • (1965) Chem. Rev. , vol.65 , pp. 177-198
    • Parks, G.1
  • 58
    • 0000691707 scopus 로고
    • A simple, accurate determination of oxide PZC and the strong buffering effect of oxide surfaces at incipient
    • Park J and Regalbuto J R 1995 A simple, accurate determination of oxide PZC and the strong buffering effect of oxide surfaces at incipient J. Colloid Interface Sci. 175 239-52
    • (1995) J. Colloid Interface Sci. , vol.175 , pp. 239-252
    • Park, J.1    Regalbuto, J.R.2


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