Tribological investigations of LIGA-microstructures

Microsystem Technologies

Volumn 2, Issue 2, 1996, Pages 63-70

  Bieger, T ^a   Wallrabe, U ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0012638612     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02447752     Document Type: Article

References (25)

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