Conformal deposition of Ti-C:H coatings over high-aspect-ratio micro-scale structures and tribological characteristics

Thin Solid Films

Volumn 429, Issue 1-2, 2003, Pages 46-54

  Cao, D M ^a   Meng, W J ^a   Simko, S J ^b   Doll, G L ^c   Wang, T ^a   Kelly, K W ^a  

^a Louisiana State University   (United States)

^b FORD RESEARCH LABORATORY   (United States)

^c TIMKEN COMPANY   (United States)

Author keywords

LIGA technique; Ti C:H coatings

Indexed keywords

ASPECT RATIO; CHEMICAL VAPOR DEPOSITION; COMPOSITION; ELECTROPLATING; OPTICAL MICROSCOPY; PHYSICAL VAPOR DEPOSITION; RAMAN SCATTERING; TRIBOLOGY;

CONFORMAL DEPOSITION;

INORGANIC COATINGS;

EID: 0038297569     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(03)00275-X     Document Type: Article

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