Sputter-deposited metal contacts for n-type GaN

Semiconductor Science and Technology

Volumn 19, Issue 2, 2004, Pages 176-182

  Hall, H P ^a   Awaah, M A ^a   Das, K ^a  

^a TUSKEGEE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

METAL CONTACTS; METAL INDUCED GAP STATES; SPUTTERING DAMAGE INDUCED SURFACE STATES;

CAPACITANCE MEASUREMENT; CHROMIUM; COPPER; CURRENT VOLTAGE CHARACTERISTICS; CURVE FITTING; GOLD; MOLECULAR BEAM EPITAXY; NICKEL; PLATINUM; SAPPHIRE; SEMICONDUCTING FILMS; SPUTTER DEPOSITION;

GALLIUM NITRIDE;

EID: 1242288214     PISSN: 02681242     EISSN: None     Source Type: Journal    
DOI: 10.1088/0268-1242/19/2/009     Document Type: Article

References (44)

1. Chen L C, Hsu C Y, Lan W H and Teng S Y 2003 Solid State Electron. 47 1843
2. Werner R, Reinhardt M, Emmerling M, Forchel A, Härle V and Bazhenov A 2000 Physica E 7 915
3. Flannery L B, Harrison I, Lacklison D E, Dykeman R I, Cheng T S and Foxon C T 1997 Mater. Sci. Eng. B 50 307
4. Brown J, Borgess R, Piner E, Vescan A, Singhal S and Therrien R 2002 Solid State Electron. 46 1535
5. Moon J, Mocovic M, Kurdoghlian A, Janke P, Hashimoto P, Wong W, McCray L and Nguyen C 2002 IEEE Electron. Device Lett. 23 637
6. Mistele D 2002 Mater. Sci. Eng. B 93 107
7. Ren F et al 2000 Solid State Electron. 44 239
8. Pearton S et al 2001 Mater. Sci. Eng. B 82 227
9. Foresi J S and Moustakas T D 1993 Appl. Phys. Lett. 62 2859
10. Smith L, Davis R, Kim M, Carpenter R and Huang Y 1996 J. Mater. Res. 11 2257
11. Ping A, Khan M and Adesida I 1996 J. Electron. Mater. 25 819
12. Luther B, Mohney S, Jackson T, Khan M, Cheng Q and Yang J 1997 Appl. Phys. Lett. 70 57
13. Wu Y, Jiang W, Keller B, Keller S, Kapolnek D, Denbaars S, Mishra U and Wilson B 1997 Solid State Electron. 41 165
14. Smith L, Bremser M, Carlson E, Weeks T, Huang Y, Kim M, Carpenter R and Davis R 1996 Mater. Res. Soc. Symp. Proc. 395 861
15. Schmitz A C, Ping A T, Khan M A, Chen Q, Yang J and Adesida I 1998 J. Electron. Mater. 27 255
16. DeLucca J M, Mohney S E, Auret F D and Goodman S A 2000 J. Appl. Phys. 88 2593
17. Bardeen J 1947 Phys. Rev. 71 717
18. Crowley A M and Sze S M 1965 J. Appl. Phys. 36 3212
19. Kalinina E, Kuznetsov N, Dmitriev V, Irvine K and Carter C 1996 J. Electron. Mater. 25 831
20. Kampen T U and Monch W 1996 MRS Internet J. Nitride Semicond. Res. 1 41
21. Hasegawa H, Koyama Y and Hashizume T 1999 Japan. J. Appl. Phys. 38 2634
22. Heine V 1965 Phys. Rev. 138 A1689
23. Monch W 1986 Festkorperprobleme 26 67
24. Monch W Adv. Solid State Phys. (Engl. Transl.)
25. Monch W 1996 Appl. Surf. Sci. 92 367
26. de Boer F R, Boom R, Mattens W C, Miedema A R and Nielsen A K 1988 Cohesion in Metals (Eindhoven: North-Holland) p 699
27. Bornstein L 1982 Numerical Data and Functional Relationships in Science and Technology vol III/17 and III/22, ed O Madelung (Berling: Springer)
28. Crowell C R and Sze S M 1966 Solid State Electron. 9 1035
29. Pandovani F M and Stratton R 1966 Solid State Electron. 9 695
30. Crowell C R 1965 Solid State Electron. 8 395
31. Shaw M P 1981 Handbook of Semiconductors (Amsterdam: North-Holland) chapter 1
32. Sze S M, Crowell C R and Kahng D 1964 J. Appl. Phys. 36 2534
33. Schockley W and Reed W 1952 Phys. Rev. 87 835
34. Grove A S 1967 Physics and Technology of Semiconductor Devices (New York: Wiley)
35. Ioannou D E, Papanicolaou N A and Nordquist P A 1987 IEEE Trans. Electron. Devices 34 1694
36. Das K, Kong H S, Petit J B, Bumgarner J W, Davis R F and Matus L G 1990 J. Electrochem. Soc. 137 1598
37. Das K, Humphreys T P, Parikh N R and Posthill J B 1989 Electron. Lett. 25 823
38. Das K, Palmour J W, Posthill J B, Humphreys T P, O'Sullivan-French J, Byrd N J, Lu D, Wortman J J and Parikh N R 1989 IEEE Electron. Device Lett. 10 135
39. Schmitz A C, Ping A T, Khan M A and Adesida I 1996 GaN and Related Materials, MRS Symp. Proc. 395 831
40. Hacke P, Detchprohm T, Hiramatsu K and Sawaki N 1993 Appl. Phys. Lett. 63 2676
41. Wang L, Nathan M, Lim T, Khan M A and Chen Q 1996 Appl. Phys. Lett. 68 1267
42. Lampert M A and Mark P 1970 Current Injection in Solid (New York: Academic) pp 3-26
43. Hall H P, Awaah M A and Das K 2004 Phys. Stat. Solidi. at press
44. Sze S M 1981 Physics of Semiconductor Devices 2nd edn (New York: Wiley)