Tilting out-of-plane platform for optical applications

2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest

Volumn , Issue , 2002, Pages 81-82

  Overstolz, T ^a   Clerc, P A ^a   Gale, M T ^b   Herzig, H P ^a   Niederer, G ^a   Noell, W ^a   Sochtig J ^b   Thiele, H ^b   De Rooij, N F ^a  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

^b CSEM   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATIC ACTUATORS;

ANGULAR DEPENDENCIES; NOVEL CONCEPT; OPTICAL APPLICATIONS; OPTICAL PLATFORMS; OUT-OF PLANE; OUT-OF-PLANE DEFLECTION; TELECOM APPLICATIONS; VERTICAL COMB DRIVE;

MOEMS;

EID: 84963768718     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2002.1031453     Document Type: Conference Paper

References (3)

1. W. Noell et al. "Applications of SOI-Based Optical MEMS", IEEE Journal on selected topics in quantum electronics, Vol. 8, No. 1, January/February 2002
2. O. Manzardo, H-P. Herzig, C. Marxer, N.F. de Rooij, "New design for an integrated Fourier transform spectrometer", Proc. SPIE Vol. 4178, p. 310-319
3. V. Milanovic, M. Last, K.Pister, "Monolithic silicon micromirrors with large scanning angle", IEEE/LEOS Optical MEMS 2001