Using extended BELST process in fabricating vertical comb actuator for optical application

2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest

Volumn , Issue , 2002, Pages 133-134

  Hsieh, Jerwei ^a   Chu, Chien Cheng ^a   Tsai, J M L ^a   Fng, Weileun ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; ELECTROSTATIC ACTUATORS; MOEMS; SILICON WAFERS;

DRIVING VOLTAGES; ELECTROSTATIC ACTUATION; HIGH ASPECT RATIO MICROMACHINING; OPTICAL APPLICATIONS; OPTICAL PERFORMANCE; TORSIONAL SPRINGS; VERTICAL COMB ACTUATORS; VERTICAL COMB-DRIVE ACTUATOR;

ACTUATORS;

EID: 84963736806     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2002.1031479     Document Type: Conference Paper

References (5)

1. H.-M. Jeong, J.-J. Choi, K. Y. Kim, K. B. Lee, J. U Jeon, and Y. E. Pak, Transducers'99, Sendai, Japan, 1999.
2. R. A. Conant, J. T. Nee, K. Y. Lau, and R. S. Muller, in Hilton Head' 2000.
3. H. Schenk, P. Durr, T. Haase, D. Kunze, U. Sobe, H. Lakner, and H. Kuck, IEEE Journal of Selected Topics in Quantum Electronics, vol. 6, 2000.
4. J. Kim, S. Park, and D. Cho, Transducers '01, Munich, Germany, 2001.
5. J. Hsieh and W. Fang, JMM, 2002, to be published.