Surface-micromachined electrostatic-comb driven scanning micromirrors for barcode scanners

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1996, Pages 192-197

  Kiang, Meng Hsiung ^a   Solgaard, Olav ^a   Muller, Richard S ^a   Lau, Kam Y ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELECTROSTATIC DEVICES; FABRICATION; LASER BEAMS; MICROMACHINING; MIRRORS; MOTORS; NATURAL FREQUENCIES; OPTICAL DEVICES; SEMICONDUCTING SILICON; SURFACES;

ELECTROSTATIC COMB MOTOR; LASER BEAM DEFLECTOR; OPTICAL SCANNER SYSTEM; SCANNING MICROMIRRORS;

SCANNING;

EID: 0029752062     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)