Fast driving technique for integrated thermal bimorph actuator toward high-throughput atomic-force microscopy

Review of Scientific Instruments

Volumn 73, Issue 7, 2002, Pages 2643-

  Akiyama, T ^a   Staufer, U ^a   De Rooij, N F ^a  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

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Indexed keywords

EID: 0036640695     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1488148     Document Type: Article

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