Piezoresistive sensors on AFM cantilevers with atomic resolution

Microelectronic Engineering

Volumn 41-42, Issue , 1998, Pages 441-444

  Jumpertz, R ^a   Hart, A V D ^a   Ohlsson, O ^b   Saurenbach, F ^c   Schelten, J ^a  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

^b Nanosensors GmbH   (Germany)

^c SIS GmbH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRIC RESISTANCE; FABRICATION; PIEZOELECTRIC TRANSDUCERS; SEMICONDUCTING SILICON;

AFM CANTILEVERS;

SENSORS;

EID: 0031655234     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(98)00102-6     Document Type: Article

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