Conductivity and distribution of charge on electroluminescent Si/SiO 2 structures investigated by electrostatic force microscopy

Applied Surface Science

Volumn 222, Issue 1-4, 2004, Pages 131-137

  Suominen, T ^a   Paturi, P ^a   Huhtinen, H ^a   Heikkila L ^a   Hedman, H P ^a   Punkkinen, R ^a   Laiho, R ^a  

^a UNIVERSITY OF TURKU   (Finland)

Author keywords

Conductivity processes; Electroluminescence; Electrostatic force microscopy; Silicon silicon dioxide

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; ELECTRIC CHARGE; ELECTRIC CONDUCTIVITY; ELECTRIC CURRENTS; ELECTRIC EXCITATION; ELECTROLUMINESCENCE; ELECTROSTATIC DEVICES; EPITAXIAL GROWTH; MOLECULAR ORIENTATION; SILICON WAFERS; SPUTTERING; SURFACE ROUGHNESS; THERMAL EFFECTS;

ELECTRIC CHARGE DISTRIBUTION; ELECTROSTATIC FORCE MICROSCOPY (EFM);

SILICA;

EID: 0347383775     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2003.08.004     Document Type: Article

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