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Diamond and Related Materials

Volumn 12, Issue 12, 2003, Pages 2128-2135

Boron-doped diamond scanning probe for thermo-mechanical nanolithography

(3) Bae, J H a Ono, T a Esashi, M a

a TOHOKU UNIVERSITY (Japan)

Author keywords

Boron doped diamond; Nanolithography; Polymethylmethacrylate

Indexed keywords

BORON; DOPING (ADDITIVES); DURABILITY; ELECTRIC CURRENTS; NANOTECHNOLOGY; POLYMETHYL METHACRYLATES; PROBES; SILICON; THERMAL CONDUCTIVITY; WEAR RESISTANCE;

CHEMICAL INERTNESS; HEATER ELEMENTS;

DIAMONDS;

COATING;

EID: 0346783208 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/S0925-9635(03)00252-8 Document Type: Article

Times cited : (14)

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