Sputtering: Survey of observations and derived principles

Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences

Volumn 362, Issue 1814, 2004, Pages 29-53

  Baragiola, Raúl A ^a  

^a University of Virginia   (United States)

Author keywords

Atomic collisions; Depth profiling; SIMS; Sputtering; Surfaces

Indexed keywords

EID: 0346671337     PISSN: 1364503X     EISSN: None     Source Type: Journal    
DOI: 10.1098/rsta.2003.1301     Document Type: Review

References (123)

1. Ageev, V. N. 1994 Desorption induced by electronic transitions. Prog. Surf. Sci. 47, 55-204.
2. Andersen, H. H. 1993 Nonlinear effects in collisional sputtering under cluster impact. Mat.-Fys. Medd. K. Dan. Vidensk. Selsk. 43, 127-153.
3. Andersen, H. H. & Bay, H. L. 1981 Sputtering yield measurements. In Sputtering by particle bombardment. I (ed. R. Behrisch), ch. 4. Springer.
4. Auciello, O. & Kelly, R. 1984 Ion bombardment modification of surfaces. Elsevier.
5. Balaji, V., David, D. E., Magnera, T. F., Michl, J. & Urbassek, H. M. 1990 Sputtering yields of condensed rare gases. Nucl. Instrum. Meth. Phys. Res. B 46, 435-440.
6. Baragiola, R. A. 1992 Principles of electron-stimulated desorption. In Collision processes of ion, positron and photon beams with matter, pp. 199-213. World Science.
7. Baragiola, R. A. 1994a Electron emission from surfaces by impact of polyatomic ions and cosmic dust. Nucl. Instrum. Meth. Phys. Res. B 88, 33-43.
8. Baragiola, R. A. 1994b Ion-induced kinetic and Auger electron emission from solids. In Low energy ion-surface interactions (ed. J. W. Rabalais), ch. 4. Wiley.
9. Baragiola, R. A. & Madey, T. E. 1991 Desorption induced by electronic transitions: basic principles and mechanisms. In Interactions of charged particles with solids and surfaces (ed. F. Flores et al.), pp. 313-344. New York: Plenum.
10. Baragiola, R. A., Nair, L. & Madey, T. E. 1991 Symmetric versus asymmetric collisions in ion-induced Auger emission from silicon. Nucl. Instrum. Meth. Phys. Res. B 58, 322-327.
11. Baragiola, R. A., Vidal, R. A., Svendsen, W., Schou, J., Shi, M., Bahr, D. A. & Atteberry, C. L. 2003 Sputtering of water ice. Nucl. Instrum. Meth. Phys. Res. B 209, 294-303.
12. 2(111). Phys. Rev. Lett. 85, 780-783.
13. Behrisch, R. (ed.) 1981 Sputtering by particle bombardment. I. Springer.
14. Behrisch, R. (ed.) 1983 Sputtering by particle bombardment. II. Springer.
15. Behrisch, R. & Wittmaack, K. (eds) 1991 Sputtering by particle bombardment. III. Springer.
16. Benninghoven, A., Rüdenauer, F. G. & Werner, H. W. 1987 Secondary ion mass spectrometry. Wiley.
17. Bergman, A. A., Buijs, J., Herbig, J., Mathes, D., Wilson, C., Reimann, C. T., Baragiola, R. A., Hull, R. & Oscarsson, S. O. 1998 Nanometer-scale arrangement of HSA by adsorption on defect arrays created with a finely focused ion beam. Langmuir 14, 6785-6788.
18. Bertrand, P. G. & Rabalais, J. W. 1994 Ion scattering and recoiling for elemental analysis and structure determination. In Low energy ion-surface interactions (ed. J. W. Rabalais). Wiley.
19. Betz, G. & Wehner, G. K. 1983 Sputtering of multi-component materials. In Sputtering by particle bombardment. II (ed. R. Behrisch), ch. 2. Springer.
20. Betz, G. & Wien, K. 1994 Energy and angular distributions of sputtered particles. Int. J. Mass Spectrom. Ion Process. 140, 1-110.
21. Biersack, J. P. & Eckstein, W. 1984 Sputtering studies with the Monte Carlo program TRIM.SP. Appl. Phys. A 34, 73-94.
22. Birtcher, E. C., Donnelly, S. E. & Schlutig, S. 2000 Nanoparticle ejection from Au induced by single Xe ion impacts. Phys. Rev. Lett. 85, 4968-4971.
23. Bobbert, C., Schütte, S., Steinbach, C. & Buck, U. 2002 Fragmentation and reliable size distributions of large ammonia and water clusters. Eur. Phys. J. D 19, 183-192.
24. n clusters (n = 1-13). Phys. Rev. B 65, 144106.
25. Brown, W. L. & Sosnowski, M. 1995 Cluster-solid interaction experiments. Nucl. Instrum. Meth. Phys. Res. B 102, 305-311.
26. Carter, G. 2001 The physics and applications of ion beam erosion. J. Phys. D 34, R1-R22.
27. Carter, G. & Colligon, J. S. 1968 Ion bombardment of solids. Portsmouth, NH: Heinemann.
28. Chason, E., Mayer, T. M., Kellerman, B. K., Mcilroy, D. T. & Howard, A. J. 1994 Roughening instability and evolution of the Ge(001) surface during ion sputtering. Phys. Rev. Lett. 72, 3040-3043.
29. Chey, S. J. & Cahill, D. G. 1997 Surface defects created by low energy (20-240 eV) ion bombardment of Ge(001). Surf. Sci. 380, 377-384.
30. Cooper, J. F., Johnson, R. E., Mauk, B. H., Garrett, H. B. & Gehrels, N. 2001 Energetic ion and electron irradiation of the icy Galilean satellites. Icarus 149, 133-159.
31. Cortona, A., Husinsky, W. & Betz, G. 1999 Influence of adsorbates, crystal structure, and target temperature on the sputtering yield and kinetic-energy distribution of excited Ni atoms. Phys. Rev. B 59, 15495-15505.
32. Costantini, G., de Mongeot, E. B., Boragno, C. & Valbusa, U. 2001 Is ion sputtering always a 'negative homoepitaxial deposition'? Phys. Rev. Lett. 86, 838-841.
33. + bombardment. J. Geophys. Res. 104, 1865-1872.
34. Dwek, E., Foster, S. M. & Vancura, O. 1996 Cooling, sputtering, and infrared emission from dust grains in fast non-radiative shocks. Astrophys. J. 457, 244-252.
35. Ens, W. 1993 Desorption experiments on organic insulators with low-energy particle beams. Mat.-Fys. Medd. K. Dan. Vidensk. Selsk. 43, 155-207.
36. Facsko, S., Dekorsy, T., Koerdt, C., Trappe, C., Kurz, H., Vogt, A. & Hartnagel, H. L. 1999 Formation of ordered nanoscale semiconductor dots by ion sputtering. Science 285, 1551-1553.
37. Frost, F., Schindler, A. & Bigl, F. 2000 Roughness evolution of ion sputtered rotating InP surfaces: pattern formation and scaling laws. Phys. Rev. Lett. 85, 4116-4119.
38. Gnaser, H. 1996 Processes in low-energy ion-surface collisions: preferential sputtering, defect and adatom formation. Appl. Surf. Sci. 100, 316-328.
39. Gnaser, H., Schneider, H. J. & Oechsner, H. 1998 Abundance and detection sensitivity in secondary-neutral mass spectrometry with electron-gas post-ionization. Nucl. Instrum. Meth. Phys. Res. B 137, 1023-1027.
40. Grosjean, D. E., Baragiola, R. A. & Brown, W. L. 1995 Effects of weak external electric fields on photon and particle emission from ion bombarded solid argon. Phys. Rev. Lett. 74, 1474-1477.
41. Grosjean, D. E., Baragiola, R. A., Vidal, R. A. & Brown, W. L. 1997 Absolute luminescence efficiency of ion-bombarded solid argon. Phys. Rev. B 56, 6975-6981.
42. Grosjean, D. E., Baragiola, R. A. & Brown, W. L. 2000 Effects of under- and overlayers on particle and photon emission from solid Ar induced by 2 MeV protons. Nucl. Instrum. Meth. Phys. Res. B 164, 891-896.
43. Grove, W. R. 1852 On the electro-chemical polarity of gases. Phil. Trans. R. Soc. Lond. 142, 87-101.
44. Håkansson, P. 1993 Desorption experiments on insulators with high-energy particle beams. Mat.-Fys. Medd. K. Dan. Vidensk. Selsk. 43, 593-622.
45. Hapke, B. 2001 Space weathering from Mercury to the asteroid belt. J. Geophys. Res. Planets 106, 10039-10073.
46. Hauffe, W. 1991 Production of microstructures by ion-beam sputtering. In Sputtering by particle bombardment. III. (ed. R. Behrisch & K. Wittmaack), ch. 6. Springer.
47. Hayderer, G. (and 11 others) 2001 Kinetically assisted potential sputtering of insulators by highly charged ions. Phys. Rev. Lett. 86, 3530-3533.
48. He, C., Basler, J. N. & Becker, C. H. 1997 Uniform elemental analysis of materials by sputtering and photoionization mass spectrometry. Nature 385, 797-799.
49. Higashi, Y. 1999 Quantitative depth profiling by laser-ionization sputtered neutral mass spectrometry. Spectrochim. Acta B 54, 109-122.
50. Hofer, W. O. 1991 Angular, energy and mass distribution of sputtered particles. In Sputtering by particle bombardment. III. (ed. R. Behrisch & K. Wittmaack). Springer.
51. Husinsky, W. 1985 The application of Doppler shift laser fluorescence spectroscopy for the detection and energy analysis of particles evolving from surfaces. J. Vac. Sci. Technol. B 3, 1546-1559.
52. Ishitani, T. & Yaguchi, T. 1996 Cross-sectional sample preparation by focused ion beam: a review of ion-sample interaction. Microsc. Res. Tech. 35, 320-333.
53. Itoh, N. & Stoneham, A. M. 2001 Materials modification by electronic excitations. Cambridge University Press.
54. Jakas, M. M., Bringa, E. M. & Johnson, R. E. 2002 Fluid dynamics calculation of sputtering from a cylindrical thermal spike. Phys. Rev. B 65, 165425.
55. Jiang, Z. X. & Alkemade, P. F. A. 1998 The complex formation of ripples during depth profiling of Si with low energy, grazing oxygen beams. Appl. Phys. Lett. 73, 315-317.
56. Johnson, R. E. 1990 Energetic charged-particle interactions with atmospheres and surfaces. Springer.
57. Johnson, R. E. & Baragiola, R. 1991 Lunar surface - sputtering and secondary ion mass spectrometry. Geophys. Res. Lett. 18, 2169-2172.
58. Johnson, R. E. & Schou, J. 1993 Sputtering of inorganic insulators. Mat.-Fys. Medd. K. Dan. Vidensk. Selsk. 43, 403-493.
59. Jurac, S., Johnson, R. E. & Donn, B. 1998 Monte Carlo calculations of the sputtering of grains: enhanced sputtering of small grains. Astrophys, J. 503, 247-252.
60. Kaminsky, M. 1965 Atomic and ionic impact phenomena on metal surfaces. Springer.
61. Kim, J., Cahill, D. G. & Averback, R. S. 2003 Surface morphology of Ge(111) during etching by keV ions. Phys. Rev. B 67, 045404.
62. Knotek, M. L. 1984 Stimulated desorption. Rep. Prog. Phys. 47, 1499-1561.
63. Kowalski, Z. W. 2001 Ion sputter induced surface morphology - biomedical implications. Vacuum 63, 603-608.
64. + ions with energies from 50 to 600 eV. J. Appl. Phys. 32, 365-369.
65. Lehrer, C., Frey, L., Petersen, S. & Ryssel, H. 2001 Limitations of focused ion beam nanomachining, J. Vac. Sci. Technol. B 19, 2533-2538.
66. Li, J., Stein, D., McMullan, C., Branton, D., Aziz, M. J. & Golovchenko, J. A. 2001 Ion-beam sculpting at nanometre length scales. Nature 412, 166-169.
67. Ma, Z., Thompson, R. N., Lykke, K. R., Pellin, M. J. & Davis, A. M. 1995 New instrument for microbeam analysis incorporating submicron imaging and resonance ionization mass spectrometry. Rev. Scient. Instrum. 66, 3168-3176.
68. McClanahan, E. D. & Laegreid, N. 1991 Production of thin films by controlled deposition of sputtered material. In Sputtering by particle bombardment. III. (ed. R. Behrisch & K. Wittmaack), ch. 7. Springer.
69. McDonnell, J. A. M. 1992 Hypervelocity impacts in space. Canterbury, UK: University of Kent.
70. Malherbe, J. B. 1994 Sputtering of compound semiconductor surfaces. 1. Ion-solid interactions and sputtering yields. Crit. Rev. Solid State Mater. Sci. 19, 55-127.
71. Malherbe, J. B. & Odendaal, R. Q. 1999 Ion sputtering, surface topography, SPM and surface analysis of electronic materials. Appl. Surf. Sci. 145, 192-200.
72. Massey, H. S. W. & Burhop, E. H. S. 1956 Electronic and ionic impact phenomena. Oxford University Press.
73. Matsunami, N., Sataka, M. & Iwase, A. 2002 Electronic sputtering of oxides by high energy heavy ion impact. Nucl. Instrum. Meth. Phys. Res. B 193, 830-834.
74. Mayr, S. G. & Averback, R. S. 2001 Surface smoothing of rough amorphous films by irradiation-induced viscous flow. Phys. Rev. Lett. 87, 196106.
75. Meisel, D. D., Janches, D. & Mathews, J. D. 2002 The size distribution of Arecibo interstellar particles and its implications. Astrophys. J. 579, 895-904.
76. Murty, M. V. R. 2002 Sputtering: the material erosion tool. Surf. Sci. 500, 523-544.
77. Nicolussi, G. K., Pellin, M. J., Lykke, K. R., Trevor, J. L., Mencer, D. E. & Davis, A. M. 1996 Surface analysis by SNMS: femtosecond laser postionization of sputtered and laser desorbed atoms. Surf. Interface Analysis 24, 363-370.
78. Oechsner, H. 1970 Energy distributions in sputtering processes. Z. Phys. A 238, 433-451.
79. Oechsner, H. 1995 Secondary neutral mass spectrometry (SNMS) - recent methodical progress and applications to fundamental studies in particle surface interaction. Int. J. Mass Spectrom. 143, 271-282.
80. Oliva-Florio, A., Alonso, E. V., Baragiola, R. A., Ferrón, J. & Jakas, M. M. 1979 Energy dependence of the molecular effect in sputtering. Radiat. Eff., 50, L3-L7.
81. Oliva-Florio, A., Alonso, E. V., Baragiola, R. A. & Ferrón, J. 1983 Low-dose effects in the sputtering of evaporated films. Radiat. Eff. 76, L137-L142.
82. Oliva-Florio, A., Baragiola, R. A., Jakas, M. M., Alonso, E. V. & Ferrón, J. 1987 Noble-gas ion sputtering yield of gold and copper: dependence on the energy and angle of incidence of the projectiles. Phys. Rev. B 35, 2198-2204.
83. Pacholski, M. L. & Winograd, N. 1999 Imaging with mass spectrometry. Chem. Rev. 99, 2977-3006.
84. Payling, R., Jones, D. & Bengtson, A. (eds) 1997 Glow discharge optical emission spectrometry. Wiley.
85. Ramsier, R. D. & Yates, J. T. 1991 Electron-stimulated desorption: principles and applications. Surf. Sci. Rep. 12, 243-378.
86. Rehn, L. E., Birtcher, R. C., Donnelly, S. E., Baldo, P. M. & Funk, L. 2001 Origin of atomic clusters during ion sputtering. Phys. Rev. Lett. 87, 207601.
87. Reimann, C. T. 1993 Theoretical models for sputtering and desorption of bio-organic molecules under collisional and electronic excitation by ion impact. Mat.-Fys. Medd. K. Dan. Vidensk. Selsk. 43, 351-401.
88. Roosendal, H. E. 1981 Sputtering yields of single crystalline targets. In Sputtering by particle bombardment. I (ed. R. Behrisch), ch. 5. Springer.
89. Rost, M. J., van Albada, S. B. & Frenken, J. W. M. 2001 How asymmetric islands become symmetric. Phys. Rev. Lett. 86, 5938-5941.
90. Rusponi, S., Costantini, G., Boragno, C. & Valbusa, U. 1998 Scaling laws of the ripple morphology on Cu(110). Phys. Rev. Lett. 81, 4184-4187.
91. Schenkel, T., Newman, M. W., Niedermayr, T. R., Machicoane, G. A., McDonald, J. W., Barnes, A. V., Hamza, A. V., Banks, J. C., Doyle, B. L. & Wu, K. J. 2000 Electronic sputtering of solids by slow, highly charged ions: fundamentals and applications. Nucl. Instrum. Meth. Phys. Res. B 161, 65-75.
92. Scherzer, B. M. U. 1983 Development of surface topography due to gas ion implantation. In Sputtering by particle bombardment. II (ed. R. Behrisch), ch. 7. Springer.
93. Shi, M., Baragiola, R. A., Grosjean, D. E., Johnson, R. E., Jurac, S. & Schou, J. 1995 Sputtering of water ice surfaces and the production of extended neutral atmospheres. J. Geophys. Res. 100, 26387-26395.
94. Sigmund, P. 1969 Theory of sputtering. I. Sputtering yield of amorphous and polycrystalline targets. Phys. Rev. 184, 383-416.
95. Sigmund, P. & Lam, N. Q. 1993 Alloy and isotope sputtering. Mat.-Fys. Medd. K. Dan. Vidensk. Selsk. 43, 255-349.
96. Smentkowski, V. S. 2000 Trends in sputtering. Prog. Surf. Sci. 64, 1-58.
97. Staudt, C. & Wucher, A. 2002 Generation of large indium clusters by sputtering. Phys. Rev. B 66, 075419.
98. Stephan, T. 2001 TOF-SIMS in cosmochemistry. Planet. Space Sci. 49, 859-906.
99. Sundqvist, B. U. R. 1991 Desorption of organic molecules from solid and liquid surfaces induced by particle impact. In Sputtering by particle bombardment. III (ed. R. Behrisch & K. Wittmaack), ch. 5. Springer.
100. Szymonski, M. 1993 Electronic sputtering of alkali halides. Mat.-Fys. Medd. K. Dan. Vidensk. Selsk. 43, 495-526.
101. Thompson, M. W. 1981 Physical mechanisms of sputtering. Phys. Rep. 69, 335-371.
102. Thompson, M. W. 1987 The velocity distribution of sputtered atoms. Nucl. Instrum. Meth. Phys. Res. B 18, 411-429.
103. Thompson, M. W. 2002 Atomic collision cascades in solids. Vacuum 66, 99-114.
104. Tombrello, T. A. 1993 Sputtering in planetary science. Mat.-Fys. Medd. K. Dan. Vidensk. Selsk. 43, 659-675.
105. Toulemonde, M., Assmann, W., Trautmann, C. & Grüner, F. 2002 Jetlike component in sputtering of LiF induced by swift heavy ions. Phys. Rev. Lett. 88, 57602.
106. Townsend, P. D. 1983 Sputtering by electrons and photons. In Sputtering by particle bombardment. II (ed. R. Behrisch), ch. 4. Springer.
107. Valbusa, U., Boragno, C. & Buatier de Mongeot, F. 2002 Nanostructuring surfaces by ion sputtering. J. Phys. Condens. Matter 14, 8153-8175.
108. Valeri, S. 1993 Auger-electron emission by ion impact on solid-surfaces. Surf. Sci. Rep. 17, 85-150.
109. Varga, P. & Diebold, U. 1994 Sputtering of metals and insulators with hyperthermal singly and doubly charged rare-gas ions. In Low energy ion-surface interactions (ed. J. W. Rabalais). Wiley.
110. Wadley, H. N. G., Zhou, X., Johnson, R. A. & Neurock, M. 2001 Mechanisms, models and methods of vapor deposition. Prog. Mater. Sci. 46, 329-377.
111. Wahl, M. & Wucher, M. 1994 VUV photoionization of sputtered neutral silver clusters. Nucl. Instrum. Meth. Phys. Res. B 94, 36-46.
112. Wasa, K. & Hayakawa, S. (eds) 1992 Handbook of sputter deposition technology: principles, technology, and applications. Park Ridge, NJ: Noyes.
113. Westley, M. S., Baragiola, R. A., Johnson, R. E. & Baratta, G. A. 1995 Photodesorption from low-temperature water ice in interstellar and circumsolar grains. Nature 373, 405-407.
114. Wilson, R. G., Stevie, F. A. & Magee, C. W. 1989 Secondary ion mass spectrometry. Wiley.
115. Winograd, N. 1993 Sputtering of single crystals: experimental evidence of the ejection process. Mat.-Fys. Medd. K. Dan. Vidensk. Selsk. 43, 223-254.
116. Wissing, M., Holzwarth, M., Simeonova, D. S. & Snowdon, K. J. 1996 An apparatus for glancing incidence ion beam polishing and characterization of surfaces to angstrom-scale root-mean-square roughness. Rev. Scient. Instrum. 67, 4314-4320.
117. Wittmaack, K. 1991 Surface and depth analysis based on sputtering. In Sputtering by particle bombardment. III (ed. R. Behrisch & K. Wittmaack), ch. 4. Springer.
118. Wucher, A., Novak, F. & Reuter, W. 1988 Relative elemental sensitivity factors in secondary neutral mass spectrometry. J. Vac. Sci. Technol. A 6, 2265-2270.
119. Yamada, I. 1999 Low-energy cluster ion beam modification of urfaces. Nucl. Instrum. Meth. Phys. Res. B 148, 1-11.
120. Yamamura, Y. & Tawara, H. 1996 Energy dependence of ion-induced sputtering yields from monoatomic solids at normal incidence. Atomic Data Nucl. Data Tables 62, 149-253.
121. Yao, Y. (and 12 others) 1998 New molecular collisional interaction effect in low-energy sputtering. Phys. Rev. Lett. 81, 550-553.
122. Yu, M. L. 1991 Charged and excited-states of sputtered atoms. Top. Appl. Phys. 64, 91-160.
123. Zhou, X.-L., Zhu, X.-Y. & White, J. M. 1991 Photochemistry at adsorbate/metal interfaces. Surf. Sci. Rep. 13, 73-220.