An apparatus for glancing incidence ion beam polishing and characterization of surfaces to angstrom-scale root-mean-square roughness

Review of Scientific Instruments

Volumn 67, Issue 12, 1996, Pages 4314-4320

  Wissing, M ^a   Holzwarth, M ^a   Simeonova, D S ^a   Snowdon, K J ^a  

^a NEWCASTLE UNIVERSITY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0011134009     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1147532     Document Type: Article

References (25)

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23. This value represents the mean of 30 images taken at different positions on the sample.
24. If we consider for simplicity an ideal flat surface containing just a single scratch and allow that scratch to simply broaden as a function of time. then the rms roughness, as defined by Eq. (2). will increase to a maximum at the point where the widening scratch covers exactly half of the available surface area, and then decrease to zero.
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