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Volumn 144-145, Issue , 1999, Pages 192-200

Ion sputtering, surface topography, SPM and surface analysis of electronic materials

Author keywords

Atomic force microscopy; Ion solid interactions; Scanning probe microscopy; Semiconductors; Surface compositional changes

Indexed keywords

ATOMIC FORCE MICROSCOPY; AUGER ELECTRON SPECTROSCOPY; COMPOSITION; COMPUTER AIDED SOFTWARE ENGINEERING; ION BOMBARDMENT; MATHEMATICAL MODELS; PROBES; SCANNING ELECTRON MICROSCOPY; SPUTTERING; SURFACE TOPOGRAPHY; SURFACE TREATMENT; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 0032624757     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(98)00796-X     Document Type: Article
Times cited : (19)

References (85)
  • 1
    • 0021658129 scopus 로고
    • J.S. Williams, J.M. Poate (Eds.) Academic Press, London
    • H.H. Andersen, in: J.S. Williams, J.M. Poate (Eds.), Ion Implantation and Beam Processing, Academic Press, London, 1984, pp. 127-187.
    • (1984) Ion Implantation and Beam Processing , pp. 127-187
    • Andersen, H.H.1
  • 28
    • 3142574811 scopus 로고
    • R. Vanselow, R. Howe (Eds.) Chap. 7, Springer, Berlin
    • R. Kelly, in: R. Vanselow, R. Howe (Eds.), Chemistry and Physics of Solid Surfaces V, Chap. 7, Springer, Berlin, 1984.
    • (1984) Chemistry and Physics of Solid Surfaces , vol.5
    • Kelly, R.1
  • 40
    • 0030150403 scopus 로고    scopus 로고
    • G. Carter, Vacuum 47 (1996) 409.
    • (1996) Vacuum , vol.47 , pp. 409
    • Carter, G.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.