-
1
-
-
0021658129
-
-
J.S. Williams, J.M. Poate (Eds.) Academic Press, London
-
H.H. Andersen, in: J.S. Williams, J.M. Poate (Eds.), Ion Implantation and Beam Processing, Academic Press, London, 1984, pp. 127-187.
-
(1984)
Ion Implantation and Beam Processing
, pp. 127-187
-
-
Andersen, H.H.1
-
5
-
-
84953679766
-
-
F.A. Stevie, P.M. Kahora, D.S. Simons, P. Chi, J. Vac. Sci. Technol. A 6 (1988) 76.
-
(1988)
J. Vac. Sci. Technol. A
, vol.6
, pp. 76
-
-
Stevie, F.A.1
Kahora, P.M.2
Simons, D.S.3
Chi, P.4
-
8
-
-
0345590149
-
-
I. Weitzel, W. Hosler, R. Treichler, H. Cerva, R. Weyl, T. Voncriegern, Fresenius J. Anal. Chem. 341 (1991) 43.
-
(1991)
Fresenius J. Anal. Chem.
, vol.341
, pp. 43
-
-
Weitzel, I.1
Hosler, W.2
Treichler, R.3
Cerva, H.4
Weyl, R.5
Voncriegern, T.6
-
9
-
-
0003281687
-
-
E.-H. Cirlin, J.J. Vajo, R.E. Doty, T.C. Hasenberg, J. Vac. Sci. Technol. 9 (1991) 1395.
-
(1991)
J. Vac. Sci. Technol.
, vol.9
, pp. 1395
-
-
Cirlin, E.-H.1
Vajo, J.J.2
Doty, R.E.3
Hasenberg, T.C.4
-
17
-
-
0003127712
-
-
R. Behrisch (Ed.) Chap. 2, Springer, Berlin
-
P. Sigmund, in: R. Behrisch (Ed.), Sputtering by Particle Bombardment I, Chap. 2, Springer, Berlin, 1981.
-
(1981)
Sputtering by Particle Bombardment
, vol.1
-
-
Sigmund, P.1
-
21
-
-
0000144737
-
-
D. Briggs, M.P. Seah (Eds.) Chap. 5, 2nd edn., Wiley, Chichester
-
M.P. Seah, in: D. Briggs, M.P. Seah (Eds.), Practical Surface Analysis: Auger and X-ray Photoelectron Spectroscopy, Chap. 5, Vol. 1, 2nd edn., Wiley, Chichester, 1990.
-
(1990)
Practical Surface Analysis: Auger and X-ray Photoelectron Spectroscopy
, vol.1
-
-
Seah, M.P.1
-
26
-
-
0002639556
-
-
R. Behrisch (Ed.) Chap. 2, Springer, Berlin
-
G. Betz, G.K. Wehner, in: R. Behrisch (Ed.), Sputtering by Particle Bombardment II, Chap. 2, Springer, Berlin, 1983.
-
(1983)
Sputtering by Particle Bombardment
, vol.2
-
-
Betz, G.1
Wehner, G.K.2
-
28
-
-
3142574811
-
-
R. Vanselow, R. Howe (Eds.) Chap. 7, Springer, Berlin
-
R. Kelly, in: R. Vanselow, R. Howe (Eds.), Chemistry and Physics of Solid Surfaces V, Chap. 7, Springer, Berlin, 1984.
-
(1984)
Chemistry and Physics of Solid Surfaces
, vol.5
-
-
Kelly, R.1
-
36
-
-
0015646401
-
-
D.J. Barker, F.C. Frank, M. Moss, J.W. Steeds, I.S.T. Tsong, J. Mater. Sci. 8 (1973) 1030.
-
(1973)
J. Mater. Sci.
, vol.8
, pp. 1030
-
-
Barker, D.J.1
Frank, F.C.2
Moss, M.3
Steeds, J.W.4
Tsong, I.S.T.5
-
40
-
-
0030150403
-
-
G. Carter, Vacuum 47 (1996) 409.
-
(1996)
Vacuum
, vol.47
, pp. 409
-
-
Carter, G.1
-
42
-
-
0001445032
-
-
G. Carter, Y.V. Vishnyakov, V. Martynenko, M.J. Nobes, J. Appl. Phys. 78 (1995) 3559.
-
(1995)
J. Appl. Phys.
, vol.78
, pp. 3559
-
-
Carter, G.1
Vishnyakov, Y.V.2
Martynenko, V.3
Nobes, M.J.4
-
44
-
-
49149140725
-
-
G.W. Lewis, M.J. Nobes, G. Carter, J.L. Whitton, Nucl. Instrum. Methods 170 (1980) 363.
-
(1980)
Nucl. Instrum. Methods
, vol.170
, pp. 363
-
-
Lewis, G.W.1
Nobes, M.J.2
Carter, G.3
Whitton, J.L.4
-
46
-
-
0026257470
-
-
T.K. Chini, S.R. Bhattacharyya, D. Ghose, D. Basu, Jpn. J. Appl. Phys. 30 (1991) 2895.
-
(1991)
Jpn. J. Appl. Phys.
, vol.30
, pp. 2895
-
-
Chini, T.K.1
Bhattacharyya, S.R.2
Ghose, D.3
Basu, D.4
-
48
-
-
0012330595
-
-
E. Chason, T.M. Mayer, B.K. Kellerman, D.T. McIlroy, A.J. Howard, Phys. Rev. Lett. 72 (1994) 3040.
-
(1994)
Phys. Rev. Lett.
, vol.72
, pp. 3040
-
-
Chason, E.1
Mayer, T.M.2
Kellerman, B.K.3
McIlroy, D.T.4
Howard, A.J.5
-
49
-
-
0242358113
-
-
S.W. MacLaren, J.E. Baker, N.L. Finnegan, C.M. Loxton, J. Vac. Sci. Technol. A 10 (1992) 469.
-
(1992)
J. Vac. Sci. Technol. A
, vol.10
, pp. 469
-
-
MacLaren, S.W.1
Baker, J.E.2
Finnegan, N.L.3
Loxton, C.M.4
-
50
-
-
0342781448
-
-
M. Gericke, T. Lill, M. Trapp, C.-E. Richter, A. Hupfer, Fresenius J. Anal. Chem. 341 (1991) 31.
-
(1991)
Fresenius J. Anal. Chem.
, vol.341
, pp. 31
-
-
Gericke, M.1
Lill, T.2
Trapp, M.3
Richter, C.-E.4
Hupfer, A.5
-
52
-
-
0029338735
-
-
C.M. Demanet, J.B. Malherbe, N.G. van der Berg, V. Sankar, Surf. Interface Anal. 23 (1995) 433.
-
(1995)
Surf. Interface Anal.
, vol.23
, pp. 433
-
-
Demanet, C.M.1
Malherbe, J.B.2
Van Der Berg, N.G.3
Sankar, V.4
-
53
-
-
0029336261
-
-
A. Karen, Y. Nakagawa, M. Hatada, K. Okuno, F. Soeda, A. Ishitani, Surf. Interface Anal. 23 (1995) 506.
-
(1995)
Surf. Interface Anal.
, vol.23
, pp. 506
-
-
Karen, A.1
Nakagawa, Y.2
Hatada, M.3
Okuno, K.4
Soeda, F.5
Ishitani, A.6
-
54
-
-
0344295722
-
-
A. Benninghoven , K.T.F. Janssens, J. Tömpner, H.W. Werner (Eds.) Wiley, Chichester
-
K. Miethe, D. Schwarzbach, W. Betz, H. Nickel, R. Lüsch, W. Schlapp, G. Stingeder, M. Grasserbauer, in: A. Benninghoven , K.T.F. Janssens, J. Tömpner, H.W. Werner (Eds.), Proc. SIMS VIII, Wiley, Chichester, 1991, p. 395.
-
(1991)
Proc. SIMS
, vol.8
, pp. 395
-
-
Miethe, K.1
Schwarzbach, D.2
Betz, W.3
Nickel, H.4
Lüsch, R.5
Schlapp, W.6
Stingeder, G.7
Grasserbauer, M.8
-
55
-
-
34848919386
-
-
G. Binning, H. Rohrer, Ch. Gerber, E. Weibel, Phys. Rev. Lett. 49 (1982) 57.
-
(1982)
Phys. Rev. Lett.
, vol.49
, pp. 57
-
-
Binning, G.1
Rohrer, H.2
Gerber, Ch.3
Weibel, E.4
-
56
-
-
0001682583
-
-
H.J.W. Zandvliet, H.B. Elswijk, E.J. van Loenen, I.S.T. Tsong, Phys. Rev. B 46 (1992) 7581.
-
(1992)
Phys. Rev. B
, vol.46
, pp. 7581
-
-
Zandvliet, H.J.W.1
Elswijk, H.B.2
Van Loenen, E.J.3
Tsong, I.S.T.4
-
57
-
-
3242889480
-
-
E.A. Eklund, R. Bruinsma, J. Rudnick, R.S. Williams, Phys. Rev. Lett. 67 (1991) 1759.
-
(1991)
Phys. Rev. Lett.
, vol.67
, pp. 1759
-
-
Eklund, E.A.1
Bruinsma, R.2
Rudnick, J.3
Williams, R.S.4
-
58
-
-
0001261851
-
-
I.H. Wilson, N.J. Zheng, U. Knipping, I.S.T. Tsong, J Vac. Sci. Technol. A 7 (1989) 2840.
-
(1989)
J Vac. Sci. Technol. A
, vol.7
, pp. 2840
-
-
Wilson, I.H.1
Zheng, N.J.2
Knipping, U.3
Tsong, I.S.T.4
-
59
-
-
0029274257
-
-
D. Marton, H. Bu, K.J. Boyd, S.S. Todorov, A.H. Al-Bayati, J.W. Rabalais, Surf. Sci. 326 (1995) L489.
-
(1995)
Surf. Sci.
, vol.326
-
-
Marton, D.1
Bu, H.2
Boyd, K.J.3
Todorov, S.S.4
Al-Bayati, A.H.5
Rabalais, J.W.6
-
63
-
-
0000979999
-
-
R. Behrish (Ed.) Springer, Berlin
-
G. Carter, B. Navinsek, J.L. Whitton, in: R. Behrish (Ed.), Sputtering by Particle Bombardment II, Springer, Berlin, 1983, p. 640.
-
(1983)
Sputtering by Particle Bombardment
, vol.2
, pp. 640
-
-
Carter, G.1
Navinsek, B.2
Whitton, J.L.3
-
67
-
-
0029342921
-
-
V. Vishnyakov, G. Carter, D.T. Goddart, M.J. Noves, Vacuum 46 (1995) 637.
-
(1995)
Vacuum
, vol.46
, pp. 637
-
-
Vishnyakov, V.1
Carter, G.2
Goddart, D.T.3
Noves, M.J.4
-
69
-
-
0000402110
-
-
K. Elst, W. Vandervorst, J. Alay, J. Snauwaert, L. Hellemans, J. Vac. Sci. Technol. B 11 (1993) 1968.
-
(1993)
J. Vac. Sci. Technol. B
, vol.11
, pp. 1968
-
-
Elst, K.1
Vandervorst, W.2
Alay, J.3
Snauwaert, J.4
Hellemans, L.5
-
70
-
-
17744419292
-
-
G. Gottshalk, T.W. Fries, C. Becker, K. Wandelt, Ultramicroscopy 42-44 (1992) 1376.
-
(1992)
Ultramicroscopy
, vol.42-44
, pp. 1376
-
-
Gottshalk, G.1
Fries, T.W.2
Becker, C.3
Wandelt, K.4
-
72
-
-
0031192506
-
-
Y.I. Chen, I.H. Wilson, W.Y. Cheung, J.B. Xu, S.P. Wong, J. Vac. Sci. Technol. B 15 (1997) 809.
-
(1997)
J. Vac. Sci. Technol. B
, vol.15
, pp. 809
-
-
Chen, Y.I.1
Wilson, I.H.2
Cheung, W.Y.3
Xu, J.B.4
Wong, S.P.5
-
75
-
-
0032473732
-
-
R. Asomoza, O. Merkulov, M.A. Vidal, B. Salazar, Appl. Surf. Sci. 126 (1998) 205.
-
(1998)
Appl. Surf. Sci.
, vol.126
, pp. 205
-
-
Asomoza, R.1
Merkulov, O.2
Vidal, M.A.3
Salazar, B.4
-
77
-
-
84953003242
-
-
A. Karen, K. Okuno, F. Soeda, A. Ishitani, J. Vac. Sci. Technol. A 9 (1991) 2247.
-
(1991)
J. Vac. Sci. Technol. A
, vol.9
, pp. 2247
-
-
Karen, A.1
Okuno, K.2
Soeda, F.3
Ishitani, A.4
-
81
-
-
0030216896
-
-
C.M. Demanet, K.V. Sankar, J.B. Malherbe, N.G. van der Berg, R.Q. Odendaal, Surf. Interface Anal. 24 (1996) 497.
-
(1996)
Surf. Interface Anal.
, vol.24
, pp. 497
-
-
Demanet, C.M.1
Sankar, K.V.2
Malherbe, J.B.3
Van Der Berg, N.G.4
Odendaal, R.Q.5
-
83
-
-
0031169217
-
-
M.M. Sung, S.H. Lee, S.M. Lee, D. Marton, S.S. Perry, J.W. Rabalais, Surf. Sci. 382 (1997) 147.
-
(1997)
Surf. Sci.
, vol.382
, pp. 147
-
-
Sung, M.M.1
Lee, S.H.2
Lee, S.M.3
Marton, D.4
Perry, S.S.5
Rabalais, J.W.6
-
84
-
-
0344295664
-
-
Th. Schimmel, H. Fuchs, R. Sander, M. Lux-Steiner, Ultramicroscopy 42-44 (1992) 689.
-
(1992)
Ultramicroscopy
, vol.42-44
, pp. 689
-
-
Schimmel, Th.1
Fuchs, H.2
Sander, R.3
Lux-Steiner, M.4
-
85
-
-
84990713761
-
-
Th. Schimmel, H. Fuchs, K. Graf, R. Sander, M. Lux-Steiner, Phys. Status Solidi A 131 (1992) 89.
-
(1992)
Phys. Status Solidi A
, vol.131
, pp. 89
-
-
Schimmel, Th.1
Fuchs, H.2
Graf, K.3
Sander, R.4
Lux-Steiner, M.5
|