Surface Interactions of CF2 Radicals during Deposition of Amorphous Fluorocarbon Films

ACS Symposium Series

Volumn 787, Issue , 2001, Pages 168-186

  Mackie, Neil M ^a   Capps, Nathan E ^b   Butoi, Carmen I ^c   Fisher, Ellen R ^c  

^a MATTSON THERMAL PRODUCTS GMBH   (United States)

^b Advanced Energy Industries Incorporated   (United States)

^c Department of Environmental and Radiological Health Sciences   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0345879353     PISSN: 00976156     EISSN: None     Source Type: Book Series    
DOI: 10.1021/bk-2001-0787.ch013     Document Type: Article

References (35)

1. Miyata, K.; Hori. M.; Goto, T. J. Vac. Sci. Technol. A 1997, 15, 568.
2. Inayoshini M.; Iti, M.; Hori, M.; Goto, T.; Hiramatsu, M. J. Vac. Sci. Technol. A 1998, 16, 233.
3. Kasono, M.; Inoue, T.; Miyanaga, A.; Yamazake, S. Appl. Phys. Lett. 1992, 61, 772.
4. d'Agostino, R.; lamendola, R.; Favia, P.; Giques, A. J. Vac. Sci. Technol. A 1994, 12, 308; Sah, R.; Dishler, E. B.; bubenzer, A.; Koidl, P. Appl. Phys. Lett. 1985, 46, 739.
5. d'Agostino, R.; lamendola, R.; Favia, P.; Giques, A. J. Vac. Sci. Technol. A 1994, 12, 308; Sah, R.; Dishler, E. B.; bubenzer, A.; Koidl, P. Appl. Phys. Lett. 1985, 46, 739.
6. d'Agostino, R.; Cramarossa, F.; Fracassi, F.; Illuzzi F. in Plasma Deposition, Treatment and Etching of Polymers, R. d'Agostino, Ed., Academic Press: San Diego, CA, 1990, pp. 95.
7. Suzuki, C; Kadota, K. App Phys. Lett. 1995, 67, 2569.
8. O'Neil, J. A.; Singh, J. J. Appl. Phys. 1994, 76, 5967.
9. Takahashi, K.; Hori, M.; Goto, T. J. Vac. Sci. Technol. A 1996, 14, 2004.
10. d'Agostino, R.; Cramarossa, F.; Illuzzi, F. J. Appl. Phys. 1987, 61, 2754.
11. d'Agostino, R.; Cramarossa, F.; Fracassi, F.; DeSimoni, E.; Sibbarini, L.; Zambonin, P. G.; Caporicco, G. Thin Solid Films 143, 163.
12. Hikosaka, Y.; Toyoda, H.; Sugai, H. Jpn. J. Appl. Phys. 1993, 32, L690; O'Keefe, M. J.; Rigsbee, J. M.; J. Appl. Polym. Sci. 1994, 53, 1631.
13. Hikosaka, Y.; Toyoda, H.; Sugai, H. Jpn. J. Appl. Phys. 1993, 32, L690; O'Keefe, M. J.; Rigsbee, J. M.; J. Appl. Polym. Sci. 1994, 53, 1631.
14. Tikahashi, K.; Hori, M.; Maruyama, K.; Kishimoto, S.; Goto, T. Jpn. J. Appl. Phys. 1993, 32, L694
15. Kitamura, M. Akiya, H, Urisu, T. J. Vac. Sci. Technol. B. 1989, 7, 14.
16. Booth, J. P.; Gunge, G.; Chabert, P.; Sehwarzenbach, W . In Frontiers in Low Temperature Plasma Diagnostics II, Bad Honnef, Germany, 1997, 147.
17. Tserepi, A. D.; Derouard, J.; Booth, J. P.; Sadeghi, N. J. Appl. Phys, 1997, 81, 2124.
18. Cunge, G. Ph.D. Thesis, 1997, Laboratoire de Speetrometrie Physique, Université Joseph Fourier, BP 87, 38402 St Martin d'Hères Cedex; J. P. Booth, private communication.
19. McCurdy, P. R.; Bogart, K. H. A.; Dalleska, N. F.; Fisher, E. R. Rev. Sci. Instrum. 1997, 68, 1684.
20. Bogart, K. H. A.; Cushing, J. P.; Fisher, E. R. Chem. Phys. Lett. 1997, 267, 377.
21. Bogart, K. H. A.; Cushing, J. P.; Fisher, E. R. J. Phys. Chem. 1997, 101, 10016.
22. McCurdy, P. R.; Venturo, V. A.; Fisher, E. R. Chem. Phys. Lett. 1997, 274, 120.
23. Buss, R. J.; Ho, P. IEEE Trans. Plasma Sci. 1996, 24, 79.
24. Buss, R. J.; Ho, P.; Weber, M. E. Plasma Chem. Plasma Process. 1993, 13, 61.
25. Mackie, N. M.; Venture, V. A. Fisher, E. R. J. Phys. Chem 1998, 101, 9425.
26. Capps, N. E.; Mackie, N. M.; Fisher, E. R. J. Appl. Phys. 1998, 84, 4736.
27. Butoi, C. I., Mackie, N. M.; Williams, K. L.; Capps, N. E.; Fisher, E. R. J. Vac. Sci. Technol. A, submitted for publication.
28. Perrin, J.; Shratani, M.; Kae-Nune, P.; Videlot, H.; Jolly, J.; Guillon, J. J. Vac. Sci. Technol. A 1998 , 16, 278.
29. King, D. S.; Schenck, P. K.; Stephenson, J. C. J. Mol. Spectrosc. 1979, 78, 1.
30. Msckie, N. M.; Dalleska, N. F.; Castner, D. G.; Fisher, E. R. Chem. Mater. 1997, 9, 349.
31. Barshilia, H. C.; Mehta, B. R.; Vankar, V. D. J. Mater. Res. 1996, 11, 2852.
32. Colthup, N. B.; Daly, L. H.; Wiberley, S. E. Introduction to Infrared and Roman Spectroscopy, 3rd Ed.; Academic Press: New York, 1990.
33. Marra D. C.; Aydil, E. S. J. Vac. Sci. Technol, A 1997, 15, 2508.
34. Yasuda, H. Plasma Polymerization; Academic Press: Orlando, FL, 1985.
35. d'Agostino, R., personal communication (1998).