Anomalous effect of temperature on atomic layer deposition of titanium dioxide

Journal of Crystal Growth

Volumn 220, Issue 4, 2000, Pages 531-537

  Aarik, Jaan ^a   Aidla, Aleks ^a   Mändar, Hugo ^a   Sammelselg, Väino ^a  

^a UNIVERSITY OF TARTU   (Estonia)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLIZATION; DEPOSITION; FILM GROWTH; MORPHOLOGY; REFRACTIVE INDEX; THERMAL EFFECTS; THIN FILMS; WATER;

ATOMIC LAYER DEPOSITION; TITANIUM CHLORIDE;

TITANIUM DIOXIDE;

EID: 0034513072     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(00)00897-6     Document Type: Article

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