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Wuli Xuebao/Acta Physica Sinica

Volumn 50, Issue 12, 2001, Pages 2495-2496

Infrared analysis of bond configuration for the a-C:F:H films deposited at variable CHF3/CH4 flow ratios

(6) Yu, Xin a Ning, Zhao Yuan a Gan, Zhao Qiang a Lu, Xin Hua a Fang, Liang a Cheng, Shan Hua a

a SOOCHOW UNIVERSITY (China)

Author keywords

a C:F:H film; Fourier transform infrared spectroscopy; Ultraviolet visible spectroscopy

Indexed keywords

EID: 0042338376 PISSN: 10003290 EISSN: None Source Type: Journal
DOI: None Document Type: Article

Times cited : (1)

References (26)

1
- 21544468113
- K. Endo, T. Tatsumi, J. Appl. Phys., 78(1995), 1370
- (1995) J. Appl. Phys. , vol.78 , pp. 1370
- Endo, K.¹ Tatsumi, T.²

2
- 0032067246
- H. Yokomichi, T. Hayashi, T. Amano, A. Masuda, J. Non-Cryst. Solids, 227-230(1998), 641.
- (1998) J. Non-Cryst. Solids , vol.227-230 , pp. 641
- Yokomichi, H.¹ Hayashi, T.² Amano, T.³ Masuda, A.⁴

3
- 0034272652
- L. G. Jacobsohn, D. F. Franceschini, M. E. H. Maie da Costa, F. L. Freire, Jr., J. Vac. Sci. Techn., A18(2000), 2230.
- (2000) J. Vac. Sci. Techn. , vol.A18 , pp. 2230
- Jacobsohn, L.G.¹ Franceschini, D.F.² Maie Da Costa, M.E.H.³ Freire F.L., Jr.⁴

4
- 0042998151
- H. Yang, D. J. Tweet, Y. Ma, T. Nguyen, Appl. Phys. Lett., 73 (1998), 1514.
- (1998) Appl. Phys. Lett. , vol.73 , pp. 1514
- Yang, H.¹ Tweet, D.J.² Ma, Y.³ Nguyen, T.⁴

5
- 0000683947
- Y. Ma, H. Yang, J. Guo, C. Sathe, A. Agui, J. Nordgren, Appl. Phys. Lett., 72(1998), 3353.
- (1998) Appl. Phys. Lett. , vol.72 , pp. 3353
- Ma, Y.¹ Yang, H.² Guo, J.³ Sathe, C.⁴ Agui, A.⁵ Nordgren, J.⁶

6
- 0001295231
- K. Endo, K. Shinoda, T. Tatsumi, J. Appl. Phys., 86(1999), 2739.
- (1999) J. Appl. Phys. , vol.86 , pp. 2739
- Endo, K.¹ Shinoda, K.² Tatsumi, T.³

7
- 0031369875
- M. Walker, K. M. Baumgartuer, M. Kaiser, S. Lindenmaier, E. Rauchle, Surf. & Coatings. Techn., 97(1997), 291.
- (1997) Surf. & Coatings. Techn. , vol.97 , pp. 291
- Walker, M.¹ Baumgartuer, K.M.² Kaiser, M.³ Lindenmaier, S.⁴ Rauchle, E.⁵

8
- 0034291493
- J. W. Yi, Y. H. Lee, B. Farouk, Thin Solid Films, 374(2000), 103.
- (2000) Thin Solid Films , vol.374 , pp. 103
- Yi, J.W.¹ Lee, Y.H.² Farouk, B.³

9
- 31244434821
- in Chinese
- Y. Chao, Z. Y. Ning et al., Acta Phys. Sin., 50(2001), 784 (in Chinese).
- (2001) Acta Phys. Sin. , vol.50 , pp. 784
- Chao, Y.¹ Ning, Z.Y.²

10
- 31244436984
- in Chinese
- Z. Y. Ning, et al., Acta Phys. Sin., 50(2001), 566(in Chinese).
- (2001) Acta Phys. Sin. , vol.50 , pp. 566
- Ning, Z.Y.¹

11
- 0001658222
- H. Yokomichi, T. Hayashi, A. Masuda, Appl. Phys. Lett., 72 (1998), 2704.
- (1998) Appl. Phys. Lett. , vol.72 , pp. 2704
- Yokomichi, H.¹ Hayashi, T.² Masuda, A.³

12
- 5944245313
- K. Endo, T. Tatsumi, Jpn. J. Appl. Phys. Part. 2, 36(1997), L1531.
- (1997) Jpn. J. Appl. Phys. Part. 2 , vol.36
- Endo, K.¹ Tatsumi, T.²

13
- 0006754842
- R. P. Mota, T. Shiosawa, S. F. Durrant, M. A. B. Moraes, J. Vac. Sci. Techn., A13(1995), 2747.
- (1995) J. Vac. Sci. Techn. , vol.A13 , pp. 2747
- Mota, R.P.¹ Shiosawa, T.² Durrant, S.F.³ Moraes, M.A.B.⁴

14
- 0000771309
- K. M. Krishna, H. Ebisu, K. Hagimoto, Y. Hayashi, T. Soga, T. Jimbo, M. Umeno, Appl. Phys. Lett., 78(2001), 294.
- (2001) Appl. Phys. Lett. , vol.78 , pp. 294
- Krishna, K.M.¹ Ebisu, H.² Hagimoto, K.³ Hayashi, Y.⁴ Soga, T.⁵ Jimbo, T.⁶ Umeno, M.⁷

15
- 0032620313
- Z. J. Zhang, K. Norumi, H. Naramoto, Z. P. Wu, S. Yamomoto, A. Miyashita, M. Tamada, J. Appl. Phys., 86(1999), 1317.
- (1999) J. Appl. Phys. , vol.86 , pp. 1317
- Zhang, Z.J.¹ Norumi, K.² Naramoto, H.³ Wu, Z.P.⁴ Yamomoto, S.⁵ Miyashita, A.⁶ Tamada, M.⁷

16
- 0027687151
- L. H. Chou, H. W. Wang, J. Appl. Phys., 74(1993), 4673.
- (1993) J. Appl. Phys. , vol.74 , pp. 4673
- Chou, L.H.¹ Wang, H.W.²

17
- 0031702516
- S. F. Yoon, H. Yang, Rushi, J. Ahn, Q. Zhang, J. Electr. Mater., 27(1998), 44.
- (1998) J. Electr. Mater. , vol.27 , pp. 44
- Yoon, S.F.¹ Yang, H.² Rushi³ Ahn, J.⁴ Zhang, Q.⁵

18
- 0035273314
- N. Takada, K. Shibagaki, K. Sasaki, K. Kadota, K. I. Oyama, J. Vac. Sci. Techn., A19(2001), 689.
- (2001) J. Vac. Sci. Techn. , vol.A19 , pp. 689
- Takada, N.¹ Shibagaki, K.² Sasaki, K.³ Kadota, K.⁴ Oyama, K.I.⁵

19
- 0031502454
- S. J. Limb, K. K. Gleason, D. J. Edell, E. F. Gleason, J. Vac. Sci. Techn., A15(1997), 1814.
- (1997) J. Vac. Sci. Techn. , vol.A15 , pp. 1814
- Limb, S.J.¹ Gleason, K.K.² Edell, D.J.³ Gleason, E.F.⁴

20
- 36549099068
- R. E. Sah, B. Dischler, A. Bubenzer, P. Loidl, Appl. Phys. Lett., 46(1985), 739.
- (1985) Appl. Phys. Lett. , vol.46 , pp. 739
- Sah, R.E.¹ Dischler, B.² Bubenzer, A.³ Loidl, P.⁴

21
- 0000975001
- S. J. Limb, C. B. Labelle, K. K. Gleason, D. J. Edell, E. F. Gleason, Appl. Phys. Lett., 68(1996), 2810.
- (1996) Appl. Phys. Lett. , vol.68 , pp. 2810
- Limb, S.J.¹ Labelle, C.B.² Gleason, K.K.³ Edell, D.J.⁴ Gleason, E.F.⁵

22
- 0017959228
- W. A. Lanford, M. J. Rand, J. Appl. Phys., 49(1988), 2473.
- (1988) J. Appl. Phys. , vol.49 , pp. 2473
- Lanford, W.A.¹ Rand, M.J.²

23
- 0020719528
- R. d'Agostino, F. Gramarossa, V. Colaprico, R. d'Ettole, J. Appl. Phys., 54(1983), 1284.
- (1983) J. Appl. Phys. , vol.54 , pp. 1284
- D'Agostino, R.¹ Gramarossa, F.² Colaprico, V.³ D'Ettole, R.⁴

24
- 84985574466
- J. Tauc, R. Grigorovici, A. ranus, Phys. Stat. Solid., 15(1966), 627.
- (1966) Phys. Stat. Solid. , vol.15 , pp. 627
- Tauc, J.¹ Grigorovici, R.² Ranus, A.³

25
- 21544438866
- A. Grill, V. Patel, Appl. Phys. Lett., 60(1992), 2089.
- (1992) Appl. Phys. Lett. , vol.60 , pp. 2089
- Grill, A.¹ Patel, V.²

26
- 0019534243
- T. S. Moravec, J. C. Lee, J. Vac. Sci. Techn., 20(1982), 338.
- (1982) J. Vac. Sci. Techn. , vol.20 , pp. 338
- Moravec, T.S.¹ Lee, J.C.²

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