A crystalline hydrogenated carbon film obtained by plasma enhanced chemical vapor deposition

Journal of Applied Physics

Volumn 86, Issue 3, 1999, Pages 1317-1321

  Zhang, Z J ^a   Narumi, K ^a   Naramoto, H ^a   Wu, Z P ^a   Yamamoto, S ^a   Miyashita, A ^a   Tamada, M ^a  

^a JAPAN ATOMIC ENERGY AGENCY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CARBON; CRYSTAL ATOMIC STRUCTURE; DENSITY (SPECIFIC GRAVITY); ENERGY GAP; HYDROGEN BONDS; HYDROGENATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SYNTHESIS (CHEMICAL); THERMAL EFFECTS; THERMODYNAMIC STABILITY;

FACE CENTERED CUBIC (FCC) STRUCTURE;

AMORPHOUS FILMS;

EID: 0032620313     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.370888     Document Type: Article

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