The influence of rf induced bias on the properties of diamond-like carbon films prepared using ECR-CVD

Journal of Electronic Materials

Volumn 27, Issue 1, 1998, Pages 44-50

  Yoon, S F ^a   Yang, H ^a   Rusli, J ^a   Ahn, J ^a   Zhang, Q ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Chemical vapor deposition (CVD); Diamond like carbon; ECR; Films

Indexed keywords

CARBON; CHEMICAL VAPOR DEPOSITION; ELECTRON CYCLOTRON RESONANCE; FILM PREPARATION; HARDNESS; HYDROGEN; INFRARED SPECTROSCOPY; METHANE; RAMAN SPECTROSCOPY; SEMICONDUCTING DIAMONDS; SURFACE STRUCTURE;

DIAMOND LIKE CARBON FILM; FILM HARDNESS; INFRARED ABSORPTION SPECTROSCOPY; OPTICAL GAP;

FILM GROWTH;

EID: 0031702516     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-998-0336-4     Document Type: Article

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